Nanowear in scanning force microscopy: Information on deposits formed in and downstream of a hexane plasma.
| Title: | Nanowear in scanning force microscopy: Information on deposits formed in and downstream of a hexane plasma. |
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| Authors: | Dinelli, F., Leggett, G. J., Alexander, M. R. |
| Source: | Journal of Applied Physics; March 15 2002, Vol. 91 Issue 6, p3841-3846, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.1446220 |
| Published in: | Journal of Applied Physics |
| Language: | English |