Growth process conditions of vertically aligned carbon nanotubes using plasma enhanced chemical vapor deposition.
Title: | Growth process conditions of vertically aligned carbon nanotubes using plasma enhanced chemical vapor deposition. |
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Authors: | Chhowalla, M., Teo, K. B. K., Ducati, C. |
Source: | Journal of Applied Physics; November 15 2001, Vol. 90 Issue 10, p5308-5317, 10p |
Database: | Applied Science & Technology Source |
ISSN: | 00218979 |
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DOI: | 10.1063/1.1410322 |
Published in: | Journal of Applied Physics |
Language: | English |