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Characterizing resists and films with VUV spectroscopic ellipsometry.

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Title: Characterizing resists and films with VUV spectroscopic ellipsometry.
Authors: Boher, Pierre, Evrard, Patrick, Piel, Jean Philippe
Source: Solid State Technology; July 2001, Vol. 44 Issue 7, p165-175, 11p
Database: Applied Science & Technology Source
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RecordInfo BibRecord:
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      – Code: eng
        Text: English
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        PageCount: 11
        StartPage: 165
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      – TitleFull: Characterizing resists and films with VUV spectroscopic ellipsometry.
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          Name:
            NameFull: Boher, Pierre
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            NameFull: Evrard, Patrick
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            NameFull: Piel, Jean Philippe
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              Text: July 2001
              Type: published
              Y: 2001
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