Characterizing resists and films with VUV spectroscopic ellipsometry.
| Title: | Characterizing resists and films with VUV spectroscopic ellipsometry. |
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| Authors: | Boher, Pierre, Evrard, Patrick, Piel, Jean Philippe |
| Source: | Solid State Technology; July 2001, Vol. 44 Issue 7, p165-175, 11p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 0038111X |
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| Published in: | Solid State Technology |
| Language: | English |