A three gun sputtering system for the deposition of superconductor/insulator multilayers.
| Title: | A three gun sputtering system for the deposition of superconductor/insulator multilayers. |
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| Authors: | Maglic, S. R., Rippert, E. D., Yang, H. Q. |
| Source: | Review of Scientific Instruments; May 1997, Vol. 68, p2127-2131, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00346748 |
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| DOI: | 10.1063/1.1148107 |
| Published in: | Review of Scientific Instruments |
| Language: | English |