Influence of ion energy and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon (ta-C) films.
| Title: | Influence of ion energy and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon (ta-C) films. |
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| Authors: | Chhowalla, M., Robertson, J., Chen, C. W. |
| Source: | Journal of Applied Physics; January 1 1997, Vol. 81, p139-145, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.364000 |
| Published in: | Journal of Applied Physics |
| Language: | English |