Ar+ bombardment of Si(100) in oxygen atmosphere: room temperature oxide formation studied by x-ray photoelectron spectroscopy.
| Title: | Ar+ bombardment of Si(100) in oxygen atmosphere: room temperature oxide formation studied by x-ray photoelectron spectroscopy. |
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| Authors: | Terrasi, A., Coluzza, C., Margaritondo, G. |
| Source: | Journal of Applied Physics; September 15 1995, Vol. 78, p3820-3823, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.359896 |
| Published in: | Journal of Applied Physics |
| Language: | English |