Sheath electric field oscillation and ion kinetics in radio-frequency discharges.
| Title: | Sheath electric field oscillation and ion kinetics in radio-frequency discharges. |
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| Authors: | Fadlallah, Majida, Booth, Jean-Paul, Derouard, Jacques |
| Source: | Journal of Applied Physics; June 15 1996, Vol. 79, p8976-8981, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.362629 |
| Published in: | Journal of Applied Physics |
| Language: | English |