Stationary carbon cathodic arc: plasma and film characterization.
Title: | Stationary carbon cathodic arc: plasma and film characterization. |
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Authors: | Chhowalla, M., Davis, C. A., Weiler, M. |
Source: | Journal of Applied Physics; March 1 1996, Vol. 79, p2237-2244, 8p |
Database: | Applied Science & Technology Source |
ISSN: | 00218979 |
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DOI: | 10.1063/1.362656 |
Published in: | Journal of Applied Physics |
Language: | English |