Ion energy and plasma characterization in a silicon filtered cathodic vacuum arc.
| Title: | Ion energy and plasma characterization in a silicon filtered cathodic vacuum arc. |
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| Authors: | Bilek, M. M. M., Chhowalla, M., Weiler, M. |
| Source: | Journal of Applied Physics; February 1 1996, Vol. 79, p1287-1291, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.362654 |
| Published in: | Journal of Applied Physics |
| Language: | English |