Electron mixing performance of a magnetron sputtering cathode.
| Title: | Electron mixing performance of a magnetron sputtering cathode. |
|---|---|
| Authors: | Salahshoor, Mostafa1, salahshoor@iust.ac.ir |
| Source: | Journal of Applied Physics; 2/14/2025, Vol. 137 Issue 6, p1-13, 13p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
|---|---|
| DOI: | 10.1063/5.0249336 |
| Published in: | Journal of Applied Physics |
| Language: | English |