Quantitative Analysis of Mass Spectrometric Signals for the Estimation of Fluorine Radical Densities in CF4 and CF4/O2 Plasmas.
| Title: | Quantitative Analysis of Mass Spectrometric Signals for the Estimation of Fluorine Radical Densities in CF4 and CF4/O2 Plasmas. |
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| Authors: | Li, Jie1, Kim, Yongjae2, Han, Seunghun1, Niu, Jingjie2, Chae, Heeyeop1,2, hchae@skku.edu |
| Source: | Plasma Chemistry & Plasma Processing; Jul2022, Vol. 42 Issue 4, p989-1002, 14p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 02724324 |
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| DOI: | 10.1007/s11090-022-10259-x |
| Published in: | Plasma Chemistry & Plasma Processing |
| Language: | English |