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Current Blockage of PSA molecular in Si3N4/Si/Si3N4 Sandwich Nanopore

Bibliographic Details
Title: Current Blockage of PSA molecular in Si3N4/Si/Si3N4 Sandwich Nanopore
Authors: Xie, Zhipeng, Wang, Chengyong, Yuan, Zhishan
Source: In Procedia CIRP 2020 89:138-142
Database: ScienceDirect
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ISSN:22128271
DOI:10.1016/j.procir.2020.05.131
Published in:Procedia CIRP
Language:English