Investigating the electrical properties of (TaN)1-xCx thin films and their crystal phase evolution for enhanced performance in OTS selector devices
Title: | Investigating the electrical properties of (TaN)1-xCx thin films and their crystal phase evolution for enhanced performance in OTS selector devices |
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Authors: | Lee, Minkyu a, Lee, Sanghyeon a, Kim, Myoungsub b, Lee, Jinhan a, Won, Chihyeong a, Lee, Seungmin a, Cho, Sungjoon a, Na, Seunggyu a, Ji, Jongho a, Lee, Hanjoo a, Kum, Hyun S. a, Kim, Hyungjun a, Lee, Taeyoon a, ⁎ |
Source: | In Journal of Alloys and Compounds 10 March 2025 1019 |
Database: | ScienceDirect |
ISSN: | 09258388 |
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DOI: | 10.1016/j.jallcom.2025.179253 |
Published in: | Journal of Alloys and Compounds |
Language: | English |