| Title: |
Process Improvement for Stabilizing the VLD Effective Dose of 4500V Trench-Gated IGBT Platform |
| Authors: |
Jin, Rui, Li, Li, Pu, Kui, Zeng, Jun, Xu, Longlai, Deng, Xiaohu, Yin, Pan, Wang, Yaohua, Zhang, Wenhong, Darwish, Mohamed N. |
| Source: |
2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2021 5th IEEE. :1-3 Apr, 2021 |
| Relation: |
2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) |
| Database: |
IEEE Xplore Digital Library |
