An evaluation of Cu wiring in a production 64 Mb DRAM
| Title: | An evaluation of Cu wiring in a production 64 Mb DRAM |
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| Authors: | Cote, W., Costrini, G., Edelstein, D., Osborn, C., Poindexter, D., Sardesai, V., Bronner, G. |
| Source: | 1998 Symposium on VLSI Technology Digest of Technical Papers (Cat. No.98CH36216) VLSI technology VLSI Technology, 1998. Digest of Technical Papers. 1998 Symposium on. :24-25 1998 |
| Relation: | 1998 Symposium on VLSI Technology Digest of Technical Papers |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 0780347706 9780780347700 |
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| DOI: | 10.1109/VLSIT.1998.689184 |
| Published in: | 1998 Symposium on VLSI Technology Digest of Technical Papers (Cat. No.98CH36216), VLSI Technology, 1998. Digest of Technical Papers. 1998 Symposium on, VLSI technology |