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Bottom-up silicon nanowire resonators for nanomechanical sensing: Controlled fabrication technology and high-sensitivity frequency modulation transduction

Bibliographic Details
Title: Bottom-up silicon nanowire resonators for nanomechanical sensing: Controlled fabrication technology and high-sensitivity frequency modulation transduction
Authors: Sansa, M., Fernandez-Regulez, M., Serra-Garcia, M., Paulo, A. San, Perez-Murano, F.
Source: 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on. :214-217 Jun, 2013
Relation: 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
Database: IEEE Xplore Digital Library
More Details
ISBN:9781467359832
ISSN:2159547X
21641641
DOI:10.1109/Transducers.2013.6626740
Published in:2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on