Direct Observation of 2-D Dopant Profiles of MOSFETs Activated by Millisecond Anneal
| Title: | Direct Observation of 2-D Dopant Profiles of MOSFETs Activated by Millisecond Anneal |
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| Authors: | Adachi, K., Ohuchi, K., Aoki, N., Tanimoto, H., Tsujii, H., Eyben, P., Vanhaeren, D., Vandervorst, W., Ishimaru, K., Ishiuchi, H. |
| Source: | 2006 International Workshop on Junction Technology Junction Technology, 2006. IWJT '06. International Workshop on. :104-107 2006 |
| Relation: | 2006 International Workshop on Junction Technology |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 1424400473 9781424400478 |
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| DOI: | 10.1109/IWJT.2006.220871 |
| Published in: | 2006 International Workshop on Junction Technology, Junction Technology, 2006. IWJT '06. International Workshop on |