Noda, M., Nishimiya, T., Yamaguchi, K., Kawamura, K., Sonobe, H., Kuroda, M., . . . Takeuchi, Y. (2003). Large area thin film Si tandem module production using VHF plasma with a ladder-shaped electrode. 3rd World Conference onPhotovoltaic Energy Conversion, 2003. Proceedings of, Photovoltaic Energy Conversion, 2003. Proceedings of 3rd World Conference on, Photovoltaic energy conference, 2, 1849.

Noda, M., et al. "Large Area Thin Film Si Tandem Module Production Using VHF Plasma with a Ladder-shaped Electrode." 3rd World Conference OnPhotovoltaic Energy Conversion, 2003. Proceedings of, Photovoltaic Energy Conversion, 2003. Proceedings of 3rd World Conference on, Photovoltaic Energy Conference 2 (2003): 1849.

Noda, M., et al. "Large Area Thin Film Si Tandem Module Production Using VHF Plasma with a Ladder-shaped Electrode." 3rd World Conference OnPhotovoltaic Energy Conversion, 2003. Proceedings of, Photovoltaic Energy Conversion, 2003. Proceedings of 3rd World Conference on, Photovoltaic Energy Conference, vol. 2, 2003, p. 1849.