Incremental Plasma Etching and Depletion of Metal Mask for Generating ARSS on Fused Silica Optical Windows
Title: | Incremental Plasma Etching and Depletion of Metal Mask for Generating ARSS on Fused Silica Optical Windows |
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Authors: | Vaca, Benjamin A., Yoshino, Jude K., Genet, William E., Benge, Tyler A., Aggarwal, Ishwar D., Hutchens, Thomas C. |
Source: | 2024 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2024 Conference on. :1-2 May, 2024 |
Relation: | 2024 Conference on Lasers and Electro-Optics (CLEO) |
Database: | IEEE Xplore Digital Library |