Incremental Plasma Etching and Depletion of Metal Mask for Generating ARSS on Fused Silica Optical Windows

Bibliographic Details
Title: Incremental Plasma Etching and Depletion of Metal Mask for Generating ARSS on Fused Silica Optical Windows
Authors: Vaca, Benjamin A., Yoshino, Jude K., Genet, William E., Benge, Tyler A., Aggarwal, Ishwar D., Hutchens, Thomas C.
Source: 2024 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2024 Conference on. :1-2 May, 2024
Relation: 2024 Conference on Lasers and Electro-Optics (CLEO)
Database: IEEE Xplore Digital Library