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Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption

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Title: Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption
Authors: Young Jae Park, Man Jae Her, Youngjae Jeong, Dong Ju Choi, Dong Uk Kim, Min Gi Lim, Myung Seok Hong, Hyug Su Kwon, Kyoungsik Yu, Sangyoon Han
Source: Microsystems & Nanoengineering, Vol 10, Iss 1, Pp 1-11 (2024)
Publisher Information: Nature Publishing Group, 2024.
Publication Year: 2024
Collection: LCC:Technology
LCC:Engineering (General). Civil engineering (General)
Subject Terms: Technology, Engineering (General). Civil engineering (General), TA1-2040
More Details: Abstract The Fabry-Pérot interferometer, a fundamental component in optoelectronic systems, offers interesting applications such as sensors, lasers, and filters. In this work, we show a tunable Fabry-Pérot cavity consisting of tunable Sagnac loop reflectors (SLRs) and phase shifters based on electrostatic microelectromechanical (MEMS) actuator. The fabrication process of the device is compatible with the standard wafer-level silicon photonics fabrication processes. This electrostatic actuation mechanism provides well-balanced, scalable pathways for efficient tuning methodologies. The extinction ratio of the continuously tunable SLRs’ reflectivity is larger than 20 dB. Full 2π phase shifting is achieved, and response times of all the components are less than 25 μs. Both actuators have extremely low static power, measuring under 20 fW and the energy needed for tuning is both below 20 pJ.
Document Type: article
File Description: electronic resource
Language: English
ISSN: 2055-7434
Relation: https://doaj.org/toc/2055-7434
DOI: 10.1038/s41378-024-00728-y
Access URL: https://doaj.org/article/3873442ec50b4ce68181af6ac8be35dc
Accession Number: edsdoj.3873442ec50b4ce68181af6ac8be35dc
Database: Directory of Open Access Journals
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  Data: Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption
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  Data: <searchLink fieldCode="AR" term="%22Young+Jae+Park%22">Young Jae Park</searchLink><br /><searchLink fieldCode="AR" term="%22Man+Jae+Her%22">Man Jae Her</searchLink><br /><searchLink fieldCode="AR" term="%22Youngjae+Jeong%22">Youngjae Jeong</searchLink><br /><searchLink fieldCode="AR" term="%22Dong+Ju+Choi%22">Dong Ju Choi</searchLink><br /><searchLink fieldCode="AR" term="%22Dong+Uk+Kim%22">Dong Uk Kim</searchLink><br /><searchLink fieldCode="AR" term="%22Min+Gi+Lim%22">Min Gi Lim</searchLink><br /><searchLink fieldCode="AR" term="%22Myung+Seok+Hong%22">Myung Seok Hong</searchLink><br /><searchLink fieldCode="AR" term="%22Hyug+Su+Kwon%22">Hyug Su Kwon</searchLink><br /><searchLink fieldCode="AR" term="%22Kyoungsik+Yu%22">Kyoungsik Yu</searchLink><br /><searchLink fieldCode="AR" term="%22Sangyoon+Han%22">Sangyoon Han</searchLink>
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  Data: Microsystems & Nanoengineering, Vol 10, Iss 1, Pp 1-11 (2024)
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  Data: Abstract The Fabry-Pérot interferometer, a fundamental component in optoelectronic systems, offers interesting applications such as sensors, lasers, and filters. In this work, we show a tunable Fabry-Pérot cavity consisting of tunable Sagnac loop reflectors (SLRs) and phase shifters based on electrostatic microelectromechanical (MEMS) actuator. The fabrication process of the device is compatible with the standard wafer-level silicon photonics fabrication processes. This electrostatic actuation mechanism provides well-balanced, scalable pathways for efficient tuning methodologies. The extinction ratio of the continuously tunable SLRs’ reflectivity is larger than 20 dB. Full 2π phase shifting is achieved, and response times of all the components are less than 25 μs. Both actuators have extremely low static power, measuring under 20 fW and the energy needed for tuning is both below 20 pJ.
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