Defects, detection and measurement on polished silicon wafer surface by Atomic Force Microscope
| Title: | Defects, detection and measurement on polished silicon wafer surface by Atomic Force Microscope Quantitative microscopy; Proceedings of the 4th seminar on quantitative microscopy |
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| Authors: | Lee, W. P., Seow, W. S., Yow, H. K., Tou, T. Y. |
| Source: | PTB BERICHT F- PHYSIKALISCH TECHNISCHE BUNDESANSTALT FERTIGUNGSMESSTECHNIK. :144-150 |
| Availability: | http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN039320289&indx=1&recIds=ETOCCN039320289 |
| Database: | British Library Document Supply Centre Inside Serials & Conference Proceedings |
| ISBN: | 9783897015036 389701503X |
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| ISSN: | 01790609 |
| Published in: | PTB BERICHT F- PHYSIKALISCH TECHNISCHE BUNDESANSTALT FERTIGUNGSMESSTECHNIK |
| Language: | English |