PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth

Authors: Arcos, Teresa de los, Awakowicz, Peter, Benedikt, Jan, Biskup, Beatrix, Böke, Marc, Boysen, Nils, Buschhaus, Rahel, Dahlmann, Rainer, Devi, Anjana, Gergs, Tobias, Jenderny, Jonathan, von Keudell, Achim, Kühne, Thomas D., Kusmierz, Simon, Müller, Hendrik, Mussenbrock, Thomas, Trieschmann, Jan, Zanders, David, Zysk, Frederik, Grundmeier, Guido

Subject Terms: Condensed Matter - Soft Condensed Matter, Condensed Matter - Materials Science

Access URL: http://arxiv.org/abs/2307.00011

Azimuthal ion movement in HiPIMS plasmas -- Part II: lateral growth fluxes

Authors: Schüttler, Steffen, Thiemann-Monje, Sascha, Held, Julian, von Keudell, Achim

Subject Terms: Physics - Plasma Physics

Access URL: http://arxiv.org/abs/2306.03811

A global plasma and surface model of hydrogen/methane inductively coupled discharge to analyze hydrocarbon plasma–surface interactions in extreme-ultraviolet lithography machines.

Authors: Kemaneci, Efe¹ (AUTHOR) efe.kemaneci@asml.com, von Keudell, Achim² (AUTHOR), Heijmans, Luuk¹ (AUTHOR), Yakunin, Andrei M.¹ (AUTHOR), de Kerkhof, Mark van^1,3 (AUTHOR)

Source: Journal of Applied Physics. 7/28/2024, Vol. 136 Issue 4, p1-25. 25p.

Subject Terms: *PLASMA deposition, *LIGHT transmission, *LITHOGRAPHY, *METHANE, *HYDROCARBONS

Space‐resolved gas temperature of a microwave plasma torch used for hydrogen production via methane pyrolysis.

Authors: Kreuznacht, Simon, Böke, Marc, von Keudell, Achim

Source: Plasma Processes & Polymers; Mar2025, Vol. 22 Issue 3, p1-27, 27p

Subject Terms: HYDROGEN production, PLASMA torch, PYROLYSIS, METHANE, PLASMA temperature, CARBON-based materials, OPTICAL spectra, THERMAL equilibrium

Surface Dielectric Barrier Discharge (sDBD) for Flow Control in Plasma Conversion.

Authors: Mohsenimehr, Soad¹, Soad.Mohsenimehr@rub.de, von Keudell, Achim¹

Source: Plasma Chemistry & Plasma Processing; Nov2023, Vol. 43 Issue 6, p1633-1649, 17p

Scaling and laws of DC discharges as pointers for HiPIMS plasmas

Authors: Maszl, Christian, Laimer, Johann, von Keudell, Achim, Störi, Herbert

Subject Terms: Physics - Plasma Physics

Access URL: http://arxiv.org/abs/1508.06739

Simulation of a Microwave Plasma Torch Used for Hydrogen Production via Methane Pyrolysis.

Authors: Kreuznacht, Simon, Böke, Marc, von Keudell, Achim

Source: Plasma Processes & Polymers; Dec2024, Vol. 21 Issue 12, p1-12, 12p

Subject Terms: GREEN fuels, PLASMA torch, COMPUTATIONAL fluid dynamics, HIGH-frequency discharges, HYDROGEN production, MICROWAVE plasmas

Fast time resolved techniques as key to the understanding of energy and particle transport in HPPMS-plasmas

Authors: Maszl, Christian, Breilmann, Wolfgang, Berscheid, Lars, Benedikt, Jan, von Keudell, Achim

Subject Terms: Physics - Plasma Physics

Access URL: http://arxiv.org/abs/1405.5123

Plasma deposited carbon containing zirconia films as thermal barriers

Authors: Bedarev, Vitali, Maaß, Philipp A., Thewes, Anna, Böke, Marc, von Keudell, Achim

Source: Journal of vacuum science & technology.A.Vacuum, surfaces, and films. 41(5)

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100191613572.0x000001&indx=1&recIds=ETOCvdc_100191613572.0x000001

Origin of the energetic ions at the substrate generated during high power pulsed magnetron sputtering of titanium

Authors: Maszl, Christian, Breilmann, Wolfgang, Benedikt, Jan, von Keudell, Achim

Subject Terms: Physics - Plasma Physics

Access URL: http://arxiv.org/abs/1311.7545

Particle beam experiments for the investigation of plasma-surface interactions: application to magnetron sputtering and polymer treatment

Authors: Corbella, Carles, Grosse-Kreul, Simon, Kreiter, Oliver, Arcos, Teresa de los, Benedikt, Jan, von Keudell, Achim

Subject Terms: Physics - Plasma Physics, Condensed Matter - Materials Science

Access URL: http://arxiv.org/abs/1306.1431

Time resolved measurement of film growth during reactive high power pulsed magnetron sputtering (HIPIMS) of titanium nitride

Authors: Mitschker, Felix, Prenzel, Marina, Benedikt, Jan, Maszl, Christian, von Keudell, Achim

Source: J. Phys. D. Appl. Phys., vol. 46, no. 49, p. 495201, Dec. 2013

Subject Terms: Physics - Plasma Physics, Condensed Matter - Materials Science

Access URL: http://arxiv.org/abs/1305.7063

Bimodal substrate biasing to control \gamma-Al2O3 deposition during reactive magnetron sputtering

Authors: Prenzel, Marina, Kortmann, Annika, Stein, Adrian, von Keudell, Achim, Nahif, Farwah, Schneider, Jochen M.

Subject Terms: Physics - Plasma Physics, Condensed Matter - Materials Science

Access URL: http://arxiv.org/abs/1305.4805

The mystery of O and O3 production in the effluent of a He/O2 atmospheric pressure microplasma jet

Authors: Ellerweg, Dirk, von Keudell, Achim, Benedikt, Jan

Subject Terms: Physics - Plasma Physics

Access URL: http://arxiv.org/abs/1112.1252

Deposition of SiOx films by means of atmospheric pressure microplasma jets

Authors: Benedikt, Jan, Reuter, Rüdiger, Ellerweg, Dirk, Rügner, Katja, von Keudell, Achim

Subject Terms: Physics - Plasma Physics

Access URL: http://arxiv.org/abs/1105.2691

Diagnostics of low and atmospheric pressure plasmas by means of mass spectrometry

Authors: Benedikt, Jan, Ellerweg, Dirk, von Keudell, Achim

Subject Terms: Physics - Plasma Physics

Access URL: http://arxiv.org/abs/1105.2687

Pattern Formation in High Power Impulse Magnetron Sputtering (HiPIMS) Plasmas

Authors: Held, Julian, von Keudell, Achim

Source: Plasma chemistry and plasma processing. 40(3):643-660

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100171656877.0x000001&indx=1&recIds=ETOCvdc_100171656877.0x000001

Thermal conductivity of amorphous carbon thin films

Authors: Bullen, Andrew J., O'Hara, Keith E., Cahill, David G., Monteiro, Othon, von Keudell, Achim

Subject Terms: Condensed Matter - Materials Science, Condensed Matter - Disordered Systems and Neural Networks

Access URL: http://arxiv.org/abs/cond-mat/0008084

Ion-enhanced oxidation of aluminum as a fundamental surface process during target poisoning in reactive magnetron sputtering.

Authors: Kuschel, Thomas, von Keudell, Achim

Source: Journal of Applied Physics; Aug2010, Vol. 107 Issue 8, p103302-1-103302-9, 9p

Particle-beam experiment to study heterogeneous surface reactions relevant to plasma-assisted thin film growth and etching.

Authors: Jacob, Wolfgang, Hopf, Christian, von Keudell, Achim

Source: Review of Scientific Instruments; December 2003, Vol. 74 Issue 12, p5123-5136, 14p