Advances in Ultra-Precision Machining Technology and Applications

Contributors: Cheung, Benny, Guo, Jiang

Subject Terms: dynamics modeling, aerostatic spindle, rotor trajectory, stability, Reynolds equation, high frequency, ultrasonic-assisted vibration cutting, difficult-to-machine material, spherical steel mould, ultra-precision machining, weak-stiffness mirror, fast tool servo, clamping error, cutting error, error compensation, potassium dihydrogen phosphate (KDP) crystal, single point diamond fly-cutting, interaction mechanism, chip morphology, phase transition temperature, electrochemical machining, accuracy, period, duty ratio, lateral gap, inlet pressure, computational fluid dynamic study, partial porous orifice, dynamic stiffness and damping, fluid flow, single-particle erosion, smoothed particle hydrodynamics, mechanism, optical glass, subsurface damage, micromachining, micro-turbine, computer-aided innovation, innovation design, smart manufacturing, knowledge-based engineering, problem solving, hydrostatic guideways, thermal error, finite element simulation, motion errors, ultraprecision lapping, Al6061, FEM, 6H-SiC, fixed abrasive, tribochemical mechanical polishing, solid-phase oxidant, dry polishing, machining methods, surface layer, microchanges, wear, friction coefficient, erosion, measurement, empirical mathematical model, milling stability, delay-differential equation, computational efficiency, Floquet theory, cutting-edge radius, shear angle, cutting force, stress concentration depth, finite element analysis, MOEMS, silicon microcantilever, multifocal microlens array, femtosecond laser, dry etching, precision shafting, capacitive sensor, error sources analysis, gas–liquid two-phase flow, multi-physical field coupling simulation, processing voltage, feed rate, Technology, Engineering, Agriculture, Industrial processes, Technology: general issues, Engineering: general, Mechanical engineering

File Description: application/octet-stream

Access URL: https://directory.doabooks.org/handle/20.500.12854/143773
https://mdpi.com/books/pdfview/book/9510

A base excitation device with PZT for MEMS dynamic testing under high temperature environment

Authors: She, Dongsheng, Yang, Yiliu

Source: 2014 International Conference on Mechatronics and Control (ICMC) Mechatronics and Control (ICMC), 2014 International Conference on. :823-826 Jul, 2014

Relation: 2014 International Conference on Mechatronics and Control (ICMC)

Ultra-Sensitive Duffing Behavior of a Microcantilever

Authors: Keskar, G., Elliott, B., Skove, M. J., Rao, A. M., Serkiz, S. M.

Source: IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 8(11):1848-1855 Nov, 2008

Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology

Authors: Bao-Xu Wang, Jia-Xin Zheng, Jin-Yong Qi, Ming-Rui Guo, Bing-Rong Gao, Xue-Qing Liu

Source: Micromachines, Vol 13, Iss 2, p 218 (2022)

Subject Terms: MOEMS, silicon microcantilever, multifocal microlens array, femtosecond laser, dry etching, Mechanical engineering and machinery, TJ1-1570

File Description: electronic resource

Relation: https://www.mdpi.com/2072-666X/13/2/218; https://doaj.org/toc/2072-666X

Access URL: https://doaj.org/article/0a1e1bef1c6249f0ac1d279cca65194c

Analyte species and concentration identification using differentially functionalized microcantilever arrays and artificial neural networks

Contributors: Sepaniak, Michael [ORNL]

Source: Analytica Chimica Acta; 558; 1-2

File Description: Medium: X; Size: 94-101

Access URL: http://www.osti.gov/scitech/biblio/989535

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