Mechanical Robust Biaxial MEMS Mirror Achieving >100° Optical Scanning Angle for LiDAR Application

Authors: Huang, H., Wang, L., Su, Y., Wang, Y., Liu, Y., Zhu, X., Zhao, H., Xue, W., Li, A., Zhang, Y., Wu, Z.

Source: IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 25(3):4306-4315 Feb, 2025

A New Stick-Slip Piezoelectric Actuator Using Dual-Arch Bridge-Type Compliant Mechanisms

Authors: Wu, Y., Yang, Y., Wu, G., Cui, Y., Wei, Y.

Source: IEEE Transactions on Automation Science and Engineering IEEE Trans. Automat. Sci. Eng. Automation Science and Engineering, IEEE Transactions on. 22:5226-5237 2025

Arrangement and Control Parameter Selection Methods of Piezoelectric Traveling Wave Drag Reducer

Authors: Zhang, L., Lv, M., Zhao, X., Fan, H., Xie, Z., Li, K.

Source: IEEE Transactions on Industrial Electronics IEEE Trans. Ind. Electron. Industrial Electronics, IEEE Transactions on. 71(12):16264-16274 Dec, 2024

A Novel 2-DOF Piezoelectric Stick-Slip Actuator With Parallel Guiding Decoupling

Authors: Tong, W., Yiling, Y., Wu, G., Yuguo, C., Yanding, W.

Source: IEEE/ASME Transactions on Mechatronics IEEE/ASME Trans. Mechatron. Mechatronics, IEEE/ASME Transactions on. 29(6):4341-4352 Dec, 2024

Determination of Crosstalk in a Dual-Axis Piezoelectric MEMS Mirror and Suppression With Feedforward Algorithms

Authors: Li, A., Huang, H., Zhang, P., Su, Y., Zhang, Y., Wang, L., Liu, Y., Wang, Y., Wu, Z.

Source: IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 24(20):32272-32282 Oct, 2024

Extremely Low Frequency Flexible-Magnet Based Mechanical Antenna

Authors: Li, Qingang, Mo, Weijie, Wang, Chen, Cui, Zhi, Cui, Yong, Zang, Xining

Source: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :995-998 Jan, 2024

Relation: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

Tunable Ultra-Small Monolithically-Rolled-up Capacitors by Piezoelectric Actuation

Authors: Nguyen, Kristen, Yang, Zhendong, Wang, Allen, Wicker, Scott A., Li, Xiuling

Source: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :683-686 Jan, 2024

Relation: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

Biaxial Lissajous Scanning Piezoelectric MEMS Mirror Based on High Fill Factor and Large Optical Aperture

Authors: Huang, Hao, Wang, Lihao, Wang, Yang, Liu, Yichen, Su, Yongquan, Zhu, Weihong, Zhang, Yonggui, Wu, Zhenyu

Source: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :166-169 Jan, 2024

Relation: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

MRI Compatible Robotic Dosimeter System for Safety Assessment of Medical Implants

Authors: Martinez, Daniel E., Nieves-Vazquez, Heriberto A., Yaras, Yusuf S., Khotimsky, Alexey, Skowronski, Ben, Bradley, Lee, Oshinski, John, Degertekin, F. Levent, Ueda, Jun

Source: 2024 IEEE/SICE International Symposium on System Integration (SII) System Integration (SII), 2024 IEEE/SICE International Symposium on. :25-29 Jan, 2024

Relation: 2024 IEEE/SICE International Symposium on System Integration (SII)

Research on Preload Characteristics of the Inertial Piezoelectric Actuator

Authors: Li, Yan, Yuan, Lusheng, Wang, Liang

Source: 2023 17th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA), 2023 17th Symposium on. :1-5 Nov, 2023

Relation: 2023 17th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)

Combining Piezoresistive and Piezoelectric Sensing in PZT-Driven Resonant Mems Micromirrors for Optimal Stability

Authors: Frigerio, Paolo, Bertazzoni, Andrea, Carminati, Roberto, Molinari, Luca, Mendicino, Gianluca, Langfelder, Giacomo

Source: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :1425-1428 Jun, 2023

Relation: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

Large Stroke Piezo Mems Mirror for High-Speed Fourier Transform Spectroscopy

Authors: Pribosek, Jaka, Lagosh, Anton, Aubock, Gerald

Source: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :1449-1452 Jun, 2023

Relation: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

PZT Mems Tunable Liquid Lens with Integrated Piezoresistive Position Sensor

Authors: Tang, Zhengnan, Soda, Leo, Okatani, Taiyu, Vergara, Andrea, Suzuki, Yukio, Tanaka, Shuji

Source: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :835-838 Jun, 2023

Relation: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

A Broadband and Low Damping Piezoelectric MEMS Vibration Platform for 6-DOF Inertial Motion

Authors: Xing, Y., Yu, T., Yan, H., Yue, C., Zhao, J., Hu, M., Zhong, Y., Liu, C., Yang, W., Dong, L.

Source: IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 23(18):21327-21334 Sep, 2023

Single-Crystal PMN-PT-Laminated Piezoelectric Scanning Micromirror for Laser Beam Scanning Applications

Authors: Hwang, J., Yoon, H., Lee, S., Park, H., Ji, C.

Source: IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 23(18):21084-21095 Sep, 2023

A Novel Reciprocating Annular Piezoelectric Actuator: Design, Analysis and Experimental Evaluation

Authors: Zhao, Heng, Wang, Liang, Jin, Jia-mei, Liu, Rui

Source: 2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA), 2022 16th Symposium on. :37-41 Oct, 2022

Relation: 2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)

Design and Implementation of Robust Resonant Controller for Piezoelectrically Driven Micro-Lens Actuator

Authors: Rasid, S.M.R., Michael, A., Pota, H.R., Chen, S.

Source: Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 31(5):840-850 Oct, 2022

Design and Implementation of Multi-mode Scanning Atomic Force Microscope

Authors: Wu, Jim-Wei, Weng, Jui-Tse, Chao, Shao-An, Cen, Wen-Shan, Peng, Yuan-Chih

Source: 2021 International Automatic Control Conference (CACS) Automatic Control Conference (CACS), 2021 International. :1-6 Nov, 2021

Relation: 2021 International Automatic Control Conference (CACS)

Modeling and Optimization of ScAlN-based MEMS Mirror with Large Static Two-axis Tilting Angle

Authors: Sun, Changhe, Li, Bolun, Su, Wenqu, Liu, Yufei, Wu, Yaming

Source: 2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Nano/Micro Engineered and Molecular Systems (NEMS), 2021 IEEE 16th International Conference on. :704-708 Apr, 2021

Relation: 2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

A quadruped micromanipulation robot driven by three-degree-of-freedom ultrasonic vibration legs

Authors: Xun, Mingxin ^{1, 2}, Li, Jing ^{1, 2}, Zhang, Shijing ¹, Deng, Jie ¹, Liu, Yingxiang ^{1, 3, ∗}

Source: In Device 21 March 2025 3(3)