Simulation optimization of physical field of diamond particles deposited by multi-piece substrates HFCVD system

Authors: Haixia YANG, Mingjiang FU, Jian LUO, Tao ZHANG

Source: Jin'gangshi yu moliao moju gongcheng, Vol 43, Iss 6, Pp 735-742 (2023)

Subject Terms: hot filament chemical vapor deposition (hfcvd), fluent simulation software, optimized model, uniform growth of diamond particles, Materials of engineering and construction. Mechanics of materials, TA401-492, Mechanical engineering and machinery, TJ1-1570

File Description: electronic resource

Relation: https://doaj.org/toc/1006-852X

Access URL: https://doaj.org/article/7ebb310c7a4e49bd998927459c0ca7e1