Feasibility Study on Real Time Electrostatic Charge Monitoring in Wafer Form Process with Potential Triboelectrification Motion at Dicing Saw

Authors: Lim, Jian Liang, Wong, Qiu Yin, Bin Mokhtar, Mohamad Syafiq, Ramireddy, Jayanth Reddy, Wong, Mun Seng, Ng, Chong How, Lee, Kim Chuan, Moon, Bh

Source: 2024 IEEE 40th International Electronics Manufacturing Technology (IEMT) Electronics Manufacturing Technology (IEMT),2024 IEEE 40th International. :1-6 Oct, 2024

Relation: 2024 IEEE 40th International Electronics Manufacturing Technology (IEMT)