Temperature Sensing Elements for Harsh Environments in a 4H-SiC CMOS Technology

Authors: Mo, J., Li, J., May, A., Rommel, M., Vollebregt, S., Zhang, G.

Source: IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 71(10):5881-5887 Oct, 2024

A Fully Integrated Sequential Synchronized Switch Harvesting on Capacitors Rectifier Based on Split- Electrode for Piezoelectric Energy Harvesting

Authors: Yue, X., Mo, J., Chen, Z., Vollebregt, S., Zhang, G., Du, S.

Source: IEEE Transactions on Power Electronics IEEE Trans. Power Electron. Power Electronics, IEEE Transactions on. 39(6):7643-7653 Jun, 2024

Vibrational modes as the origin of dielectric loss at 0.27$\unicode{x2013}$100 THz in a-SiC:H

Authors: Buijtendorp, B. T., Endo, A., Jellema, W., Karatsu, K., Kouwenhoven, K., Lamers, D., van der Linden, A. J., Rostem, K., Veen, M., Wollack, E. J., Baselmans, J. J. A., Vollebregt, S.

Subject Terms: Astrophysics - Instrumentation and Methods for Astrophysics, Condensed Matter - Materials Science

Access URL: http://arxiv.org/abs/2405.13688

Copper Nanoparticle Sintering Enabled Hermetic Packaging With Fine Sealing Ring for MEMS Application

Authors: Hu, D., Shah, M.B., Fan, J., Vollebregt, S., Zhang, G.

Source: IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 70(11):5818-5823 Nov, 2023

A Highly Linear Temperature Sensor Operating up to 600°C in a 4H-SiC CMOS Technology

Authors: Mo, J., Li, J., Zhang, Y., Romijn, J., May, A., Erlbacher, T., Zhang, G., Vollebregt, S.

Source: IEEE Electron Device Letters IEEE Electron Device Lett. Electron Device Letters, IEEE. 44(6):995-998 Jun, 2023

Patterning of fine-features in nanoporous films synthesized by spark ablation

Authors: Ji, X., Van Ginkel, H.J., Hu, D., Schmidt-Ott, A., Van Zeijl, H., Vollebregt, S., Zhang, G.

Source: 2022 IEEE 22nd International Conference on Nanotechnology (NANO) Nanotechnology (NANO), 2022 IEEE 22nd International Conference on. :238-241 Jul, 2022

Relation: 2022 IEEE 22nd International Conference on Nanotechnology (NANO)

Technology Development for MEMS: A Tutorial

Authors: French, P.J., Krijnen, G.J.M., Vollebregt, S., Mastrangeli, M.

Source: IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 22(11):10106-10125 Jun, 2022

Angle Sensitive Optical Sensor for Light Source Tracker Miniaturization

Authors: Romijn, J., Sanseven, S., Zhang, G., Vollebregt, S., Sarro, P.M.

Source: IEEE Sensors Letters IEEE Sens. Lett. Sensors Letters, IEEE. 6(6):1-4 Jun, 2022

Integrated Digital and Analog Circuit Blocks in a Scalable Silicon Carbide CMOS Technology

Authors: Romijn, J., Vollebregt, S., Middelburg, L.M., Mansouri, B.E., van Zeijl, H.W., May, A., Erlbacher, T., Zhang, G., Sarro, P.M.

Source: IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 69(1):4-10 Jan, 2022

Effect of Humidity on Gas Sensing Performance of Carbon Nanotube Gas Sensors Operated at Room Temperature

Authors: Shooshtari, M., Salehi, A., Vollebregt, S.

Source: IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 21(5):5763-5770 Mar, 2021

Surface-Micromachined Silicon Carbide Pirani Gauges for Harsh Environments

Authors: Mo, J., Middelburg, L.M., Morana, B., van Zeijl, H.W., Vollebregt, S., Zhang, G.

Source: IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 21(2):1350-1358 Jan, 2021

Toward a Self-Sensing Piezoresistive Pressure Sensor for All-SiC Monolithic Integration

Authors: Middelburg, L.M., van Zeijl, H.W., Vollebregt, S., Morana, B., Zhang, G.

Source: IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 20(19):11265-11274 Oct, 2020

Hydrogenated Amorphous Silicon Carbide: A Low-loss Deposited Dielectric for Microwave to Submillimeter Wave Superconducting Circuits

Authors: Buijtendorp, B. T., Vollebregt, S., Karatsu, K., Thoen, D. J., Murugesan, V., Kouwenhoven, K., Hähnle, S., Baselmans, J. J. A., Endo, A.

Source: Phys. Rev. Appl. 18 (2022) 064003

Subject Terms: Condensed Matter - Materials Science, Astrophysics - Instrumentation and Methods for Astrophysics

Access URL: http://arxiv.org/abs/2110.03500

Wafer Level Through Polymer Optical Vias (TPOV) Enabling High Throughput of Optical Windows Manufacturing

Authors: HUANG, Z.Q., Poelma, R.H., Vollebregt, S., Koelink, M.H., Boschman, E., Kropf, R., Gallouch, M., Zhang, G.Q.

Source: 2018 7th Electronic System-Integration Technology Conference (ESTC) Electronic System-Integration Technology Conference (ESTC), 2018 7th. :1-5 Sep, 2018

Relation: 2018 7th Electronic System-Integration Technology Conference (ESTC)

Suspended graphene beams with tunable gap for squeeze-film pressure sensing

Authors: Vollebregt, S., Dolleman, R. J., van der Zant, H. S. J., Steeneken, P. G., Sarro, P. M.

Source: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th International Conference on. :770-773 Jun, 2017

Relation: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

An innovative approach to overcome saturation and recovery issues of CVD graphene-based gas sensors

Authors: Ricciardella, F., Vollebregt, S., Polichetti, T., Alfano, B., Massera, E., Sarro, P. M.

Source: 2017 IEEE SENSORS SENSORS, 2017 IEEE. :1-3 Oct, 2017

Relation: 2017 IEEE SENSORS

A transfer-free wafer-scale CVD graphene fabrication process for MEMS/NEMS sensors

Authors: Vollebregt, S., Alfano, B., Ricciardella, F., Giesbers, A. J. M., Grachova, Y., van Zeijl, H. W., Polichetti, T., Sarro, P. M.

Source: 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2016 IEEE 29th International Conference on. :17-20 Jan, 2016

Relation: 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)

Upside-down Carbon nanotube (CNT) micro-electrode array (MEA)

Authors: Gaio, N., van Meer, B., Silvestri, C., Pakazad, S., Vollebregt, S., Mummery, C. L., Dekker, R.

Source: 2015 IEEE SENSORS SENSORS, 2015 IEEE. :1-4 Nov, 2015

Relation: 2015 IEEE SENSORS

Tunable binary Fresnel lens based on stretchable PDMS/CNT composite

Authors: Li, X., Wei, L., Vollebregt, S., Poelma, R., Shen, Y., Wei, J., Urbach, P., Sarro, P.M., Zhang, G.Q.

Source: 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on. :2041-2044 Jun, 2015

Relation: TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference

High sensitive gas sensors realized by a transfer-free process of CVD graphene

Authors: Ricciardella, F., Vollebregt, S., Polichetti, T., Alfano, B., Massera, E., Sarro, P. M.

Source: 2016 IEEE SENSORS SENSORS, 2016 IEEE. :1-3 Oct, 2016

Relation: 2016 IEEE SENSORS