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    Conference

    Source: 2006 International Conference on Simulation of Semiconductor Processes and Devices Simulation of Semiconductor Processes and Devices, 2006 International Conference on. :306-313 Sep, 2006

    Relation: 2006 International Conference on Simulation of Semiconductor Processes and Devices

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    Academic Journal

    Source: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Nov/Dec2015, Vol. 33 Issue 6, p1-6, 6p

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    Academic Journal

    Authors: Seungjun Oh1, Ryoma Hayakawa1, Toyohiro Chikyow1, Yutaka Wakayama1,2, WAKAYAMA.Yutaka@nims.go.jp

    Source: Applied Physics Letters; 6/15/2015, Vol. 106 Issue 24, p1-4, 4p, 2 Diagrams, 1 Chart, 2 Graphs

    Linked Full Text
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    Academic Journal

    Source: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Sep/Oct2012, Vol. 30 Issue 5, p1-4, 4p

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