Lift-off Patterning of 1 μm Line Width using Single Layer Photoresist

Authors: Sasaki, H., Moriyama, M., Totsu, K.

Source: Denki-gakkai-ronbunshi.E, Sensa, maikuromashin-jun-bumonshi. 143(7):204-210

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN633648655&indx=1&recIds=ETOCRN633648655

Wafer bonding of polycrystalline spinel with LiNbO3/LiTaO3 for temperature compensation of RF surface acoustic wave devices

Authors: Geshi, K., Teraoka, K., Kinoshita, S., Nakayama, M., Imagawa, Y., Nakayama, S., Hashimoto, K., Tanaka, S., Totsu, K., Takagi, H.

Source: 2012 IEEE International Ultrasonics Symposium Ultrasonics Symposium (IUS), 2012 IEEE International. :2726-2729 Oct, 2012

Relation: 2012 IEEE International Ultrasonics Symposium

2-D and 3-D tactile pin display using SMA micro-coil actuator and magnetic latch

Authors: Matsunaga, T., Makishi, W., Totsu, K., Esashi, M., Haga, Y.

Source: The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Solid-State Sensors, Actuators and Microsystems Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on. 1:325-328 Vol. 1 2005

Relation: TRANSDUCERS '05. The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers

Gray-scale lithography using mask-less exposure system

Authors: Totsu, K., Fujishiro, K., Tanaka, S., Esashi, M.

Source: The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Solid-State Sensors, Actuators and Microsystems Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on. 2:1441-1444 Vol. 2 2005

Relation: TRANSDUCERS '05. The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers

Tactile display for 2-D and 3-D shape expression using SMA micro actuators

Authors: Matsunaga, T., Totsu, K., Esashi, M., Haga, Y.

Source: 2005 3rd IEEE/EMBS Special Topic Conference on Microtechnology in Medicine and Biology Microtechnology in medicine and biology Microtechnology in Medicine and Biology, 2005. 3rd IEEE/EMBS Special Topic Conference on. :88-91 2005

Relation: 2005 3rd IEEE/EMBS Special Topic Conference on Microtechnology in Medicine and Biology

125 /spl mu/m diameter fiber-optic pressure sensor system using spectrometer-based white light interferometry with high-speed wavelength tracking

Authors: Totsu, K., Haga, Y., Matsunaga, T., Esashi, M.

Source: 2005 3rd IEEE/EMBS Special Topic Conference on Microtechnology in Medicine and Biology Microtechnology in medicine and biology Microtechnology in Medicine and Biology, 2005. 3rd IEEE/EMBS Special Topic Conference on. :170-173 2005

Relation: 2005 3rd IEEE/EMBS Special Topic Conference on Microtechnology in Medicine and Biology

Piezoelectric 2D microscanner for precise laser treatment in the human body

Authors: Akahori, H., Haga, Y., Matsunaga, T., Totsu, K., Iseki, H., Esashi, M., Wada, H.

Source: 2005 3rd IEEE/EMBS Special Topic Conference on Microtechnology in Medicine and Biology Microtechnology in medicine and biology Microtechnology in Medicine and Biology, 2005. 3rd IEEE/EMBS Special Topic Conference on. :166-169 2005

Relation: 2005 3rd IEEE/EMBS Special Topic Conference on Microtechnology in Medicine and Biology

Active bending ileus tube using shape memory alloy for treatment of intestinal obstruction

Authors: Haga, Y., Mizushima, M., Matsunaga, T., Totsu, K., Esashi, M.

Source: 2005 3rd IEEE/EMBS Special Topic Conference on Microtechnology in Medicine and Biology Microtechnology in medicine and biology Microtechnology in Medicine and Biology, 2005. 3rd IEEE/EMBS Special Topic Conference on. :249-252 2005

Relation: 2005 3rd IEEE/EMBS Special Topic Conference on Microtechnology in Medicine and Biology

Vacuum sealed ultra miniature fiber-optic pressure sensor using white light interferometry

Authors: Totsu, K., Haga, Y., Esashi, M.

Source: TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Solid-state sensors, actuators and microsystems TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. 1:931-934 vol.1 2003

Relation: IEEE International Solid-State Sensors and Actuators Conference

Evaluation of Thick-Film Photoresist for Grayscale Lithography Utilizing Direct Laser Writing

Authors: Shoji, M., Jotaki, H., Moriyama, M., Totsu, K.

Source: Denki-gakkai-ronbunshi.E, Sensa, maikuromashin-jun-bumonshi. 140(5):113-118

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN623769608&indx=1&recIds=ETOCRN623769608

Metal-Bonding-Based Hermetic Wafer-Level MEMS Packaging Technology Using In-Plane Feedthrough — Hermeticity and High Frequency Characteristics of Thick Gold Film Feedthrough —

Authors: Moriyama, M., Suzuki, Y., Totsu, K., Hirano, H., Tanaka, S.

Source: Denki-gakkai-ronbunshi.E, Sensa, maikuromashin-jun-bumonshi. 138(10):485-494

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN617873525&indx=1&recIds=ETOCRN617873525

MEMS5 - 1: Invited Development of Medical and Welfare Microdevices Using Micro Technology
International display workshops

Authors: Haga, Y., Matsunaga, T., Makishi, W., Totsu, K., Esashi, M.

Source: PROCEEDINGS OF THE INTERNATIONAL DISPLAY WORKSHOPS. CONF 13:1595-1598

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN071971294&indx=1&recIds=ETOCCN071971294

MEMS2 - 5 Hermetically Sealed Ultra-Miniature Fiber Optic Pressure Sensor
International display workshops

Authors: Nakamura, S., Matsunaga, T., Totsu, K., Makishi, W., Esashi, M., Haga, Y.

Source: PROCEEDINGS OF THE INTERNATIONAL DISPLAY WORKSHOPS. CONF 13:1553-1556

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN071971180&indx=1&recIds=ETOCCN071971180

Fabrication of three-dimensional microstructure using maskless gray-scale lithography
International conference on solid-state sensors actuators and microsystems; Transducers '05

Authors: Totsu, K., Fujishiro, K., Tanaka, S., Esashi, M.

Source: SENSORS AND ACTUATORS A. 130/131:387-392

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN060651125&indx=1&recIds=ETOCCN060651125

125um Diameter Fiber-Optic Pressure Sensor System Using Spectrometer-Based White Light Interferometry with High-Speed Wavelength Tracking
Special topic conference on microtechnologies in medicine and biology

Authors: Totsu, K., Haga, Y., Matsunaga, T., Esashi, M.

Source: ANNUAL INTERNATIONAL IEEE/EMBS SPECIAL TOPIC CONFERENCE ON MICROTECHNOLOGIES IN MEDICINE AND BIOLOGY. :170-173

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN060977183&indx=1&recIds=ETOCCN060977183

Photolithography on Cylindrical Substrates for Realization of High-functional Tube-shaped Micro-tools
Proceedings of the 22nd sensor symposium on sensors, micromachines and applied systems

Authors: Goto, S., Matsunaga, T., Totsu, K., Makishi, W., Esashi, M., Haga, Y.

Source: PROCEEDINGS OF THE SENSOR SYMPOSIUM ON SENSORS MICROMACHINES AND APPLIED SYSTEMS. 22:112-115

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN058973980&indx=1&recIds=ETOCCN058973980

2B2.5 2-D and 3-D Tactile Pin Display using SMA Micro-coil Actuator and Magnetic Latch
Solid-state sensors, actuators and microsystems; Transducers '05

Authors: Matsunaga, T., Makishi, W., Totsu, K., Esashi, M., Haga, Y.

Source: TRANSDUCERS; 2005. 1:325-328

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN058790756&indx=1&recIds=ETOCCN058790756

3E4.36 Gray-Scale Lithography using Mask-Less Exposure System
Solid-state sensors, actuators and microsystems; Transducers '05

Authors: Totsu, K., Fujishiro, K., Tanaka, S., Esashi, M.

Source: TRANSDUCERS; 2005. 2:1441-1444

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN058788170&indx=1&recIds=ETOCCN058788170

Development of Ultra Miniature Fiber-Optic Blood Pressure Sensor System
Sensor symposium on sensors, micromachines, and applied systems

Authors: Totsu, K., Haga, Y., Minh, P. N., Esashi, M.

Source: PROCEEDINGS OF THE SENSOR SYMPOSIUM ON SENSORS MICROMACHINES AND APPLIED SYSTEMS. :429-432

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN045202653&indx=1&recIds=ETOCCN045202653

Tactile display using shape memory alloy micro-coil actuator and magnetic latch mechanism

Authors: Matsunaga, T., Totsu, K., Esashi, M., Haga, Y.

Source: In Displays April 2013 34(2):89-94