Showing 1 - 20 results of 1,082 Refine Results
  1. 1
    Conference

    PDMS Micro-Patterning on Wafer Based on EtchBack Lift-Off for Microsystems Fabrication

    Authors: Wang, Xuchen, Suzuki, Yukio, Matsumoto, Tatsuya, Kikuta, Toshiyuki, Li, Chung-Min, Tanaka, Shuji

    Source: 2024 IEEE SENSORS SENSORS, 2024 IEEE. :1-4 Oct, 2024

    Relation: 2024 IEEE SENSORS

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  2. 2
    Conference

    8 GHz Harmonic Surface Acoustic Wave Ladder Filters with Grooved Al Electrode in LiNbO3 Substrate

    Authors: Kadota, Michio, Yamashita, Fuyuko, Tanaka, Shuji

    Source: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024 IEEE. :1-4 Sep, 2024

    Relation: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)

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  3. 3
    Conference

    High Frequency Hetero Acoustic Layer SAW Resonator Using Quartz Thin Plate on Sapphire

    Authors: Tanakura, Shota, Kadota, Michio, Tanaka, Shuji

    Source: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024 IEEE. :1-4 Sep, 2024

    Relation: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)

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  4. 4
    Conference

    Serially Connected Strip-type Bulk Acoustic Resonator Using X40°Y-LiNbO3 (XSAR) with Bandwidth of 33%

    Authors: Guo, Yong, Kadota, Michio, Tanaka, Shuji

    Source: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024 IEEE. :1-4 Sep, 2024

    Relation: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)

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  5. 5
    Conference

    Evolution of SAW and BAW Devices Using Thin LiTaO3 and LiNbO3

    Authors: Tanaka, Shuji, Guo, Yong, Kadota, Michio

    Source: 2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM) Microwave Acoustics & Mechanics (IC-MAM), 2024 IEEE MTT-S International Conference on. :169-172 May, 2024

    Relation: 2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM)

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  6. 6
    Conference

    Advancement in the Mems Gyroscope from a Vibrating Tuning Fork to a Tuned Ring with Comb Electrodes

    Authors: Forke, Roman, Tsukamoto, Takashiro, Shaporin, Alexey, Weidlich, Sebastian, Bulz, Daniel, Hahn, Susann, Tanaka, Shuji, Hiller, Karla

    Source: 2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2024 IEEE International Symposium on. :1-4 Mar, 2024

    Relation: 2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

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  7. 7
    Conference

    High Sensitivity Mode-Localized Ring Resonator With Tunable Sensitivity

    Authors: Tsukamoto, Takashiro, Forke, Roman, Weidlich, Sebastian, Bulz, Daniel, Shaporin, Alexey, Hiller, Karla, Tanaka, Shuji

    Source: 2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2024 IEEE International Symposium on. :1-4 Mar, 2024

    Relation: 2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

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  8. 8
    Conference

    Real Time Mismatch Monitoring Using Software Defined Frequency Modulation and Rate Integrating Gyroscope

    Authors: Tsukamoto, Takashiro, Miyazaki, Fumito, Tomizawa, Yasushi, Tanaka, Shuji

    Source: 2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2024 IEEE International Symposium on. :1-4 Mar, 2024

    Relation: 2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

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  9. 9
    Conference

    Mode Localization and Frequency Modulation Sensing Using Superposed in-Phase and Anti-Phase Oscillations

    Authors: Tsukamoto, Takashiro, Forke, Roman, Weidlich, Sebastian, Bulz, Daniel, Shaporin, Alexey, Hiller, Karla, Tanaka, Shuji

    Source: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :899-902 Jan, 2024

    Relation: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

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  10. 10
    Conference

    Epitaxial SM-Doped PMN-Pt Film with High Piezoelectric Constant for MEMS Application

    Authors: Fukushi, Kai, Yoshida, Shinya, Qi, Xuanmeng, Tanaka, Shuji

    Source: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :765-768 Jan, 2024

    Relation: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

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  11. 11
    Report

    Development and Implementation of Advanced Beam Diagnostic and Abort Systems in SuperKEKB

    Authors: Yoshihara, Keisuke, Abe, Tetsuro, Aversano, Michele, Gale, Alexander, Ikeda, Hitomi, Kaji, Hiroshi, Kakuno, Hidekazu, Koga, Taichiro, Iijima, Toru, Kato, Shinnosuke, Kusudo, Ami, Liu, Yuxin, Maeda, Akane, Mitra, Sayan, Mitsuka, Gaku, Miyabayashi, Kenkichi, Nakamura, Isamu, Nakayama, Hiroyuki, Nakazawa, Yu, Nomaru, Riku, Okada, Iori, Shi, Xiao-Dong, Tanaka, Shuji, Uno, Kenta, Ushiroda, Yutaka, Urbschat, Bela, Zhang, Rui

    Source: Nucl. Instrum. Methods A, Vol. 170117, 2024

    Subject Terms: High Energy Physics - Experiment, Physics - Instrumentation and Detectors

    Access URL: http://arxiv.org/abs/2408.16184

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  12. 12
    Conference

    Acoustic Devices (PAW, SAW, and BAW) using Wafer Bonding Technology

    Authors: Kadota, Michio, Tanaka, Shuji

    Source: 2023 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS), 2023 IEEE International. :1-10 Sep, 2023

    Relation: 2023 IEEE International Ultrasonics Symposium (IUS)

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  13. 13
    Conference

    Wideband Surface Acoustic Wave Resonator with Good Temperature Stability Using LiNbO3 and Glass with Low Coefficient of Thermal Expansion

    Authors: Guo, Yong, Kadota, Michio, Ohashi, Yuji, Tanaka, Shuji

    Source: 2023 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS), 2023 IEEE International. :1-4 Sep, 2023

    Relation: 2023 IEEE International Ultrasonics Symposium (IUS)

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  14. 14
    Conference

    MEMS Using Epitaxial PZT Family

    Authors: Tanaka, Shuji, Yoshida, Shinya

    Source: 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF) Applications of Ferroelectrics (ISAF), 2023 IEEE International Symposium on. :1-5 Jul, 2023

    Relation: 2023 IEEE International Symposium on Applications of Ferroelectrics (ISAF)

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  15. 15
    Conference

    Single Pascal Vacuum Sealing of MEMS Resonator by Silicon Migration Wafer-Level Packaging Witiout Getter

    Authors: Suzuki, Yukio, Khan, Muhammad Jehanzeb, Honda, Munehiro, Miyashita, Hidetoshi, Gong, Tianjiao, Tsukamoto, Takashiro, Tanaka, Shuji

    Source: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :1539-1542 Jun, 2023

    Relation: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

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  16. 16
    Conference

    Development of piezoelectric micromachined ultrasonic transducer with dual heterogeneous piezoelectric thin film stacking

    Authors: Qi, Xuanmeng, Yoshida, Shinya, Moridi, Mohssen, Risquez, Sarah, Ghosh, Anirban, Tanaka, Shuji

    Source: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :857-860 Jun, 2023

    Relation: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

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  17. 17
    Conference

    Temperature-Compensated Pure Silicon Cantilever Resonator with Coupled Torsional Structure at Anchor

    Authors: Yamada, Shunsuke, Tanaka, Shuji

    Source: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :1817-1820 Jun, 2023

    Relation: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

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  18. 18
    Conference

    PZT Mems Tunable Liquid Lens with Integrated Piezoresistive Position Sensor

    Authors: Tang, Zhengnan, Soda, Leo, Okatani, Taiyu, Vergara, Andrea, Suzuki, Yukio, Tanaka, Shuji

    Source: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :835-838 Jun, 2023

    Relation: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

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  19. 19
    Conference

    Lissajous-FM Resonant Magnetometer

    Authors: Zhang, Linxin, Tsukamoto, Takashiro, Tanaka, Shuji

    Source: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :521-524 Jun, 2023

    Relation: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

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  20. 20
    Conference

    Mode-Matched Multi-Ring Disk Resonator using (100) Single Crystal Silicon with 2 ppm Frequency Mismatch

    Authors: Wang, Shihe, Chen, Jianlin, Tsukamoto, Takashiro, Tanaka, Shuji

    Source: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :2078-2081 Jun, 2023

    Relation: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

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