Si multiprobes integrated with lateral actuators for independent scanning probe applications.

Authors: Yoomin Ahn, Takahito Ono and Masayoshi Esashi

Source: Journal of Micromechanics & Microengineering; Jun2005, Vol. 15 Issue 6, p1224-1229, 6p

Magnetic mesa structures fabricated by reactive ion etching with CO/NH3/Xe plasma chemistry for an all-silicon quantum computer.

Authors: Dong F Wang, Atsushi Takahashi, Yoshinori Matsumoto, Kohei M Itoh, Yoshihisa Yamamoto, Takahito Ono and Masayoshi Esashi

Source: Nanotechnology; 6/1/2005, Vol. 16 Issue 6, p990-994, 5p

Subject Terms: MAGNETIC materials, THIN films, MICROMACHINING, NANOTECHNOLOGY