Automatic control of LED light source for wafer height leveling in electron beam imaging systems.

Authors: Shiguang Li, Dongdong Xie, Zhipeng Wu, Yinghao Yang, Jing Zhang, Chenxu Guo, Yiqiang Pi, Sixuan Xiao

Source: Proceedings of SPIE; 9/4/2018, Vol. 10819, p1-7, 7p