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  1. 1
    Conference

    Sustainable Environmental Technologies for Advanced Semiconductor Manufacturing Intelligent FAB

    Authors: Lee, Hyun Chul, Oh, Sehyeong, Yang, Dong Sik, Koo, Min Seok, Ham, Dong Jin, Jeong, Joonseon, Kang, Sungwoo, Chang, Jaehee, Heo, Hyeon-Su, Kim, Mijong, Ha, Jonghyun, Kuk, Su Keun, Lee, Dong Jin, Chung, Jai Young, Kim, Dongwook, Kim, Jaeeun, Lee, Jong-Min, Kwon, Hyuk Jae, Kang, Jinkyu, Kim, Jae-Young, Jung, Yu Kyung, Shim, Wooyong, Song, Seung Hoon, Kim, Jinha, Lee, Jaesoo, Kim, Dohoon, Nam, Junghun, Lee, Da-Hee, Choi, Hojun, Kim, Se-Yeon, Suh, Min-Soo, Shin, Sangyoon, Kim, JinHo, Chen, Yanfang, Kim, Hwajin

    Source: 2023 International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2023 International. :1-4 Dec, 2023

    Relation: 2023 International Electron Devices Meeting (IEDM)

    Check IEEE Xplore for full text Find It @ SCU Libraries
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