Laser thermal annealing of Ge, optimized for highly activated dopants and diode ION/IOFF ratios

Authors: Shayesteh, M., O'Connell, D., Gity, F., Murphy-Armando, F., Yu, R., Huet, K., Toque-Tresonne, I., Cristiano, F., Boninelli, S., Henrichsen, H. H., Petersen, D. H., Nielsen, P. F., Duffy, R.

Source: 2014 20th International Conference on Ion Implantation Technology (IIT) Ion Implantation Technology (IIT), 2014 20th International Conference on. :1-4 Jun, 2014

Relation: 2014 20th International Conference on Ion Implantation Technology (IIT)

Automated handling and assembly of customizable AFM-tips

Authors: Bartenwerfer, M., Eichhorn, V., Jasper, D., Fatikow, S., Savenko, A., Petersen, D. H., Malm, B., Boggild, P.

Source: 2011 IEEE International Symposium on Assembly and Manufacturing (ISAM) Assembly and Manufacturing (ISAM), 2011 IEEE International Symposium on. :1-6 May, 2011

Relation: 2011 IEEE International Symposium on Assembly and Manufacturing (ISAM)

In Situ Tuning of Focused-Ion-Beam Defined Nanomechanical Resonators Using Joule Heating

Authors: Homann, L. V., Booth, T., Lei, A., Petersen, D. H., Davis, Z. J., Boggild, P.

Source: Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 20(5):1074-1080 Oct, 2011

Black Silicon with Tunnel Oxide Passivated Contacts
European photovoltaic solar energy conference

Authors: Kloster, M. E., Witthøft, M.-L., Shearer, D. C., Hajijafarassar, A., Davidsen, R. S., Petersen, D. H., Hansen, O., Iandolo, B.

Source: European photovoltaic solar energy conference. 35(1):668-671

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN605022210&indx=1&recIds=ETOCCN605022210

Multimodal Electrothermal Silicon Microgrippers for Nanotube Manipulation

Authors: Andersen, K. N., Petersen, D. H., Carlson, K., MØlhave, K., Sardan, O., Horsewell, A., Eichhorn, V., Fatikow, S., BØggild, P.

Source: IEEE Transactions on Nanotechnology IEEE Trans. Nanotechnology Nanotechnology, IEEE Transactions on. 8(1):76-85 Jan, 2009

Pyrolytic carbon microelectrodes for impedance based cell sensing
Engineering carbon hybrids - carbon electronics (Symposium)

Authors: Hassan, Y. Mohamed, Caviglia, C., Hemanth, S., Mackenzie, D. M. A., Petersen, D. H., Keller, S. S.

Source: ECS transactions. 72(1):35-44

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN601975414&indx=1&recIds=ETOCCN601975414

Correction to "Multimodal Electrothermal Silicon Microgrippers for Nanotube Manipulation"

Authors: Andersen, K. N., Petersen, D. H., Carlson, K., Mlhave, K., Sardan, O., Horsewell, A., Eichhorn, V., Fatikow, S., Boggild, P.

Source: IEEE Transactions on Nanotechnology IEEE Trans. Nanotechnology Nanotechnology, IEEE Transactions on. 8(5):659-659 Sep, 2009

Fundamental size limitations of micro four-point probes
Micro- and nano-engineering; MNE'08

Authors: Ansbaek, T., Petersen, D. H., Hansen, O., Larsen, J. B., Hansen, T. M., Boggild, P.

Source: MICROELECTRONIC ENGINEERING. 86(4/6):987-990

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN072853487&indx=1&recIds=ETOCCN072853487

On the analysis of the activation mechanisms of sub-melt laser anneals
Front-end junction and contact formation in future silicon/germanium based devices

Authors: Clarysse, T., Bogdanowicz, J., Goossens, J., Moussa, A., Rosseel, E., Vandervorst, W., Petersen, D. H., Lin, R., Nielsen, P. F., Hansen, O.

Source: MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS. 154/155:24-30

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN071318951&indx=1&recIds=ETOCCN071318951

Topology optimized electrothermal polysilicon microgrippers
International conference on micro and nano engineering

Authors: Sardan, O., Petersen, D. H., Molhave, K., Sigmund, O., Boggild, P.

Source: MICROELECTRONIC ENGINEERING. 85(5-6):1096-1099

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN069392099&indx=1&recIds=ETOCCN069392099

Static contact micro four-point probes with <11nm positioning repeatability
International conference on micro and nano engineering

Authors: Petersen, D. H., Hansen, O., Hansen, T. M., Petersen, P. R., Boggild, P.

Source: MICROELECTRONIC ENGINEERING. 85(5-6):1092-1095

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN069392086&indx=1&recIds=ETOCCN069392086

Microfabricated Tools for Pick-and-Place of Nanoscale Components
Mechatronic systems; Mechatronics 2006

Authors: Boggild, P., Petersen, D. H., Kjelstrup-Hansen, J., Molhave, K., Andersen, K. N., Sardan, O.

Source: IFAC SYMPOSIUM ON MECHATRONIC SYSTEMS PREPRINTS -CD-ROM EDITION-. :120-126

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN064499000&indx=1&recIds=ETOCCN064499000

Beyond SRP: Quantitative carrier profiling with M4PP
Si-based materials for advanced microelectronic devices : synthesis, defects and diffusion

Authors: Clarysse, T., Vandervorst, W., Lin, R., Petersen, D. H., Nielsen, P. F.

Source: NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH SECTION B. 253(1/2):136-140

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN062532865&indx=1&recIds=ETOCCN062532865

Simulated SAM A-scans on multiplayer MEMS components
Reliability of electron devices, failure physics and analysis; ESREF 2002

Authors: Janting, J., Petersen, D. H., Greisen, C.

Source: MICROELECTRONICS RELIABILITY. 42(NO 9-11):1811-1814

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN045311855&indx=1&recIds=ETOCCN045311855

Systematic study of shallow junction formation on germanium substrates

Authors: Hellings, G., Rosseel, E., Clarysse, T., Petersen, D. H., Hansen, O., Nielsen, P. F., Simoen, E., Eneman, G., De Jaeger, B., Hoffmann, T.

Source: MICROELECTRONIC ENGINEERING. 88(4):347-350

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN312223191&indx=1&recIds=ETOCRN312223191

Anomalous activation of shallow B^+ implants in Ge

Authors: Yates, B. R., Darby, B. L., Rudawski, N. G., Jones, K. S., Petersen, D. H., Hansen, O., Lin, R., Nielsen, P. F., Kontos, A.

Source: MATERIALS LETTERS. 65(23-24):3540-3543

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN298564633&indx=1&recIds=ETOCRN298564633

Optimization of FIB milling for rapid NEMS prototyping

Authors: Malm, B., Petersen, D. H., Lei, A., Booth, T. J., Homann, L. V., Boggild, P.

Source: MICROELECTRONIC ENGINEERING. 88(8):2671-2674

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN293994624&indx=1&recIds=ETOCRN293994624

Electrothermal microgrippers for pick-and-place operations
International conference on micro and nano engineering

Authors: Andersen, K. N., Carlson, K., Petersen, D. H., Molhave, K., Eichhorn, V., Fatikow, S., Boggild, P.

Source: MICROELECTRONIC ENGINEERING. 85(5-6):1128-1130

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN069392177&indx=1&recIds=ETOCCN069392177

Epitaxial Integration of Nanowires in Microsystems by Local Micrometer-Scale Vapor-Phase Epitaxy

Authors: Molhave, K., Wacaser, B. A., Petersen, D. H., Wagner, J. B., Samuelson, L., Boggild, P.

Source: SMALL. 4(10):1741-1746

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN238573580&indx=1&recIds=ETOCRN238573580

Wafer-scale fabrication of polymer distributed feedback lasers

Authors: Christiansen, M. B., Scholer, M., Balslev, S., Nielsen, R. B., Petersen, D. H., Kristensen, A.

Source: JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B MICROELECTRONICS AND NANOMETER STRUCTURES. 24(6):3252-3257

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN201077964&indx=1&recIds=ETOCRN201077964