Beam shaping for micro via drilling, dicing, and microtrimming [5175-18]
Laser beam shaping IV

Authors: Lizotte, T. E.

Source: PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. 5175:149-159

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN050608096&indx=1&recIds=ETOCCN050608096

Novel beam delivery system for microvia drilling using holographic and refractive optics [4977-07]
Photon processing in microelectronics and photonics

Authors: Lizotte, T. E., Ohar, O. P.

Source: PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. 4977:28-37

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN049058690&indx=1&recIds=ETOCCN049058690

The use of holographic and diffractive optics for optimized machine vision illumination for critical dimension inspection [5265-02]

Authors: Lizotte, T. E., Ohar, O.

Source: PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. (5265):16-23

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN149160600&indx=1&recIds=ETOCRN149160600

Chemical free cleaning using excimer lasers [2703-35]
Lasers as Tools for Manufacturing of Durable Goods and Microelectronics

Authors: Lizotte, T. E., O'Keeffe, T. R.

Source: PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. (2703):279-287

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN010491320&indx=1&recIds=ETOCRN010491320

Beam optimization for dry cleaning processes [2703-32]
Lasers as Tools for Manufacturing of Durable Goods and Microelectronics

Authors: Lizotte, T. E., Ohar, O. P., Baker, T. J., O'Keeffe, T. R.

Source: PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. (2703):244-253

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN010491290&indx=1&recIds=ETOCRN010491290

Excimers Smooth the Path to Well-Lubricated Bearings

Authors: Lizotte, T. E.

Source: PHOTONICS SPECTRA. 36(3):134-136

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN110526775&indx=1&recIds=ETOCRN110526775

The use of holographic and diffractive optics for optimized machine vision illumination for critical dimension inspection [5265-02]
Two- and Three-Dimensional Vision Systems for Inspection, Control, and Metrology

Authors: Lizotte, T. E., Ohar, O.

Source: PROCEEDINGS- SPIE, THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. 5265:16-23

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN051995660&indx=1&recIds=ETOCCN051995660

Chemical-free cleaning using excimer lasers [2703-35]
Lasers as tools for manufacturing: Lasers as tools for manufacturing of durable goods and microelectronics

Authors: Lizotte, T. E., O'Keeffe, T. R.

Source: PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. (2703):279-287

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN014277740&indx=1&recIds=ETOCCN014277740

Beam optimization for dry cleaning processes [2703-32]
Lasers as tools for manufacturing: Lasers as tools for manufacturing of durable goods and microelectronics

Authors: Lizotte, T. E., Ohar, O. P., Baker, T. J., O'Keeffe, T. R.

Source: PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. (2703):244-253

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN014277713&indx=1&recIds=ETOCCN014277713

Excimer laser as a manufacturing tool [2062-01]
Lasers as tools for manufacturing

Authors: O'Keeffe, T. R., Lizotte, T. E.

Source: PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. (2062):2-13

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN002371110&indx=1&recIds=ETOCCN002371110

Diffractive optic based pitch, roll, and Z axis displacement sensor [6290-19]
Laser beam shaping

Authors: Lizotte, T. E., Ohar, O. P., Tuttle, T.

Source: PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. 6290:62900H-62900H

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN061960501&indx=1&recIds=ETOCCN061960501

Fan out diffractive beam splitter: 5 phase level binary versus 50 phase level grayscale [6290-14]
Laser beam shaping

Authors: Lizotte, T. E., Ohar, O. P.

Source: PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. 6290:62900D-62900D

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN061960465&indx=1&recIds=ETOCCN061960465

Automated optical function testing of diffractive beam shapers [6290-13]
Laser beam shaping

Authors: Lizotte, T. E., Ohar, O. P.

Source: PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. 6290:62900C-62900C

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN061960452&indx=1&recIds=ETOCCN061960452

Grayscale fabrication errors and their impact on beam shaper performance [6187-23]
Photon management

Authors: Lizotte, T. E.

Source: PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. 6187:61870N-61870N

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN060779075&indx=1&recIds=ETOCCN060779075

Comparing identically designed grayscale (50 phase level) and binary (5 phase levels) splitters: actual versus modeled performance [6187-12]
Photon management

Authors: Lizotte, T. E., Ohar, O. P., Tuttle, T.

Source: PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. 6187:61870C-61870C

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN060778991&indx=1&recIds=ETOCCN060778991

Excimer laser as a manufacturing tool [2062-01]
Lasers as Tools for Manufacturing

Authors: O'Keeffe, T. R., Lizotte, T. E.

Source: PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. (2062):2-2

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCEN014843085&indx=1&recIds=ETOCEN014843085

BEAM SHAPING FOR MICROVIA DRILLING

Authors: Lizotte, T. E.

Source: PC FAB. 26(2):28-28

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN126769520&indx=1&recIds=ETOCRN126769520

Adaptation of an existing diffractive mono-mode beam shaping design to compensate a wavelength change.

Authors: Weible, K. J., Lizotte, T. E.

Source: Proceedings of SPIE; Nov2009 Part 3, Issue 1, p74300U-74300U-8, 8p