Dual-Electrode SC0.3AL0.7N pMUT with Ultra-High Output Pressure for Long Distance Ranging

Authors: Liu, Jihang, Wai Choong, David Sze, Shun Teo, Yong, Hong, Yan, Chen, Daniel Ssu-Han, Ghosh, Sagnik, Pea, Siow Pey, Chin Chan, Huan, Liu, Peng, Li, Minghua, Lin, Huamao, Zhang, Qing Xin, Hyun Kee Chang, Peter, Srinivas, Merugu, Giusti, Domenico, Leotti, Alberto, Koh, Yul, Zhu, Yao

Source: 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2025 IEEE 38th International Conference on. :107-110 Jan, 2025

Relation: 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS)

Ultrasonic Particle Levitation Using Piezoelectric Micromachined Ultrasound Transducer Array for Non-Contact Particle Manipulation

Authors: Ghosh, Sagnik, Choong, David S. W., Liu, Jihang, Chen, Daniel S.-H., Shun Teo, Yong, Hong, Yan, Leotti, Alberto, Giusti, Domenico, Vezzoli, Ivan, Zhu, Yao, Koh, Yul

Source: 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2025 IEEE 38th International Conference on. :573-576 Jan, 2025

Relation: 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS)

Wafer-Level Extraction of Multilayer Residual Stress in PVD-PZT PMUTs Through an Automated Coupled Method with FEM and Measurement

Authors: Ramegowda, Prakasha Chigahalli, Trivedi, Shyam, Ghosh, Sagnik, Wai Choong, David Sze, Goh Jian, Duan, Jihang, Liu, You, Qian, Giust, Domenico, D'Ercoli, Filippo, Leotti, Alberto, Koh, Yul

Source: 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2025 IEEE 38th International Conference on. :592-595 Jan, 2025

Relation: 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS)

Preliminary Evaluation of Multi-Angle Spatial Compound Imaging with pMUTs

Authors: Sarafianou, Mantalena, Giubilei, Gaia, Choong, David S. W., Goh, Duan J., Koh, Yul, Leotti, Alberto, Lazzari, Carla, Jia, Jason Zhigang, Giusti, Domenico

Source: 2024 IEEE SENSORS SENSORS, 2024 IEEE. :1-4 Oct, 2024

Relation: 2024 IEEE SENSORS

Application of Continuous Wavelet Transform for Time-of-Flight Ranging Applications Using air-Coupled pMUTs

Authors: Sarafianou, Mantalena, Wai Choong, David Sze, Jian Goh, Duan, Merugu, Srinivas, Zhang, Qing Xin, Chang, Peter H. K., Giusti, Domenico, Leotti, Alberto, Scaldaferri, Rossana, Kunnavakkam, Madan, Koh, Yul

Source: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024 IEEE. :1-4 Sep, 2024

Relation: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)

Short-Range Small-Form-Factor 2D Source Localization Using pMUT-Based Delay-Multiply-and-Sum Imaging Towards Catheter Coordination

Authors: Sarafianou, Mantalena, Wai Choong, David Sze, Jian Goh, Duan, Merugu, Srinivas, Zhang, Qing Xin, Chang, Peter H. K., Giusti, Domenico, Leotti, Alberto, Shankar, Ravi, Koppisetti, Goutham, Koh, Yul

Source: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024 IEEE. :1-4 Sep, 2024

Relation: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)

Residual Stress Analysis in ScAlN Micro-Diaphragm for High Sensitivity and Wide Range Pressure Sensing

Authors: Liu, Jihang, Chen, Daniel Ssu-Han, Jian, Goh Duan, Wai, David Choong Sze, Srinivas, Merugu, Huamao, Lin, Xin, Zhang Qing, Kee, Peter Chang Hyun, Giusti, Domenico, Leotti, Alberto, D'Ercoli, Filippo, Lazzari, Carla, Tacchini, Riccardo, Koh, Yul

Source: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024 IEEE. :1-4 Sep, 2024

Relation: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)

2D Surface Reconstruction Using an air-Coupled pMUT-Based Synthetic Aperture Array

Authors: Sarafianou, Mantalena, Choong, David Sze Wai, Goh, Duan Jian, Merugu, Srinivas, Zhang, Qing Xin, Chang, Peter H. K., Giusti, Domenico, Leotti, Alberto, Barabani, Luca, Mohamed Hamsah, Adriyan Hidayat, Koh, Yul

Source: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024 IEEE. :1-4 Sep, 2024

Relation: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)

Compensation of Thermal Effects in PZT and Sc0.2Al0.8N PMUTs Through DC Bias Tuning

Authors: Goh, Duan Jian, Liu, Jihang, Wai Choong, David Sze, Ghosh, Sagnik, Chen, Daniel Ssu-Han, Shankar, Ravi, Prelini, Carlo Luigi, Leotti, Alberto, Giusti, Domenico, Koh, Yul

Source: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024 IEEE. :1-4 Sep, 2024

Relation: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)

Wafer level Demonstration and Characterization of c-Axis Oriented Sc0.3Al0.7N Bilayer Stacks

Authors: Lin, Huamao, Liu, Peng, Chen, Daniel Ssu-Han, Varghese, Binni, Wong, Veronica, Li, Minghua, Hong, Yan, Tsang, Yat Fung, Xin Zhang, Qing, Kee Chang, Peter Hyun, Zakiyyan, Naadaa, Koppisetti, Goutham, Das, Amal, Sim, Dao Hao, Lung Lee, Yee, Leotti, Alberto, Zhu, Yao

Source: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024 IEEE. :1-4 Sep, 2024

Relation: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)

Curved Cantilever Actuated ScAlN PMUT for Enhanced Linearity and Transmit Sensitivity

Authors: Trivedi, Shyam, Goh, Duan Jian, Ramegowda, Prakasha Chigahalli, Choong, David Sze Wai, Liu, Jihang, Chen, Daniel Ssu-Han, Teo, Yong Shun, Merugu, Srinivas, Yan, Hong, Zhang, Qing Xin, Koh, Yul, Leotti, Alberto, Shankar, Ravi, Zakiyyan, Naadaa Ghulaam, Das, Amal, Lazzari, Carla

Source: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024 IEEE. :1-4 Sep, 2024

Relation: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)

Dual-electrode pMUT with Switch Mode Operation to Enhance Receive Sensitivity

Authors: Liu, Jihang, Chen, Daniel Ssu-Han, Sze Wai, David Choong, Jian, Goh Duan, Shyam, Trivedi, Shun, Teo Yong, Srinivas, Merugu, Yan, Hong, Huamao, Lin, Xin, Zhang Qing, Leotti, Alberto, Goutham, Jia, Jason Zhigang, Chan, Huan Chin, Lee, Ee Chin, Koh, Yul

Source: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024 IEEE. :1-4 Sep, 2024

Relation: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)

Hybrid AIR-Coupled Rangefinder with Sputtered PVD PZT and SC0.2AL0.8N PMUTs for Pulse-Echo Applications

Authors: Wai Choong, David Sze, Ssu-Han Chen, Daniel, Sarafianou, Mantalena, Goh, Duan Jian, Liu, Jihang, Ghosh, Sagnik, Ramegowda, Prakasha, Merugu, Srinivas, Zhang, Qing Xin, Chang, Peter, Das, Amal, Leotti, Alberto, Lazzari, Carla, Giusti, Domenico, Koh, Yul

Source: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024 IEEE. :1-4 Sep, 2024

Relation: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)

Towards Unparallelled CMOS-compatible Air-coupled pMUT Performance with 30% Sc-doped AlN through an Analysis of Residual Stress Effects

Authors: Liu, Jihang, Jian, Goh Duan, Ssu-Han Chen, Daniel, Sze Wai, David Choong, Shyam, Trivedi, Ramegowda, Prakasha Chigahalli, Srinivas, Merugu, Huamao, Lin, Xin, Zhang Qing, Chang Hyun Kee, Peter, Das, Amal, Sciarrone, Alessandra, Leotti, Alberto, Giusti, Domenico, Lee, Joshua E.-Y., Koh, Yul

Source: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024 IEEE. :1-4 Sep, 2024

Relation: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)

A Study on PVD PZT and Sc0.2Al0.8N PMUTS in Series and Parallel Connection for Optimizing Acoustic Performance

Authors: Wai Choong, David Sze, Ssu-Han Chen, Daniel, Sarafianou, Mantalena, Goh, Duan Jian, Liu, Jihang, Merugu, Srinivas, Ghosh, Sagnik, Ramegowda, Prakasha, Zhang, Qing Xin, Chang, Peter, Lee, Joshua En-Yuan, Jia, Jason, Leotti, Alberto, Baretta, Luigi, Giusti, Domenico, Savoia, Alessandro, Koh, Yul

Source: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024 IEEE. :1-4 Sep, 2024

Relation: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)

Long-Range Ultrasound Wake-Up Receiver Using Pzt-Scaln Hybrid Pmut Link With Exponential Horn

Authors: Trivedi, Shyam, Goh, Duan J., Chen, Weiguo, Toh, Wei D., Zhang, Jun, Ghosh, Sagnik, Giusti, Domenico, Leotti, Alberto, Chan, Huan C., Koppisetti, Goutham, Zhang, Yao, Gao, Yuan, Lee, Joshua E.-Y., Koh, Yul

Source: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :501-504 Jan, 2024

Relation: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

Evaluating the Influence of PMUT Mechanical Support Properties on Power Conversion Efficiency in Ultrasonically Powered Implants

Authors: Savoia, Alessandro S., Giusti, Domenico, Prelini, Carlo, Saccher, Marta, Rashidi, Amin, Leotti, Alberto, Giagka, Vasiliki, Ferrera, Marco

Source: 2023 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS), 2023 IEEE International. :1-4 Sep, 2023

Relation: 2023 IEEE International Ultrasonics Symposium (IUS)

A Feasibility Study on Underwater 2D Localization Using PZT pMUTs

Authors: Sarafianou, Mantalena, Chen, Daniel Ssu-Han, Sze Wai Choong, David, Goh, Duan Jian, Liu, Jihang, Lee, Joshua En-Yuan, Merugu, Srinivas, Zhang, Qing Xin, Chang, Peter H. K., Giusti, Domenico, Castoldi, Laura, Pedrini, Claudia, Barabani, Luca, Leotti, Alberto, Hur, Young Jik, Lung Lee, Yee

Source: 2023 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS), 2023 IEEE International. :1-4 Sep, 2023

Relation: 2023 IEEE International Ultrasonics Symposium (IUS)

Performance Analysis of Wideband PMUTs: a Comparative Study Between Sol-Gel PZT, PVD PZT, and 15% ScAlN-Based Arrays Through Experimental Evaluation

Authors: Savoia, Alessandro S., Giusti, Domenico, Prelini, Carlo, Chang, Peter, Leotti, Alberto, Lee, Joshua, Koh, Yul, Ferrera, Marco

Source: 2023 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS), 2023 IEEE International. :1-4 Sep, 2023

Relation: 2023 IEEE International Ultrasonics Symposium (IUS)

DC-Bias Effects on Sputtered PZT pMUTs with High Transmit and Receive Sensitivities in Immersion for Imaging applications

Authors: Sarafianou, Mantalena, Wai Choong, David Sze, Jian Goh, Duan, Liu, Jihang, Merugu, Srinivas, Zhang, Qing Xin, Chang, Peter H. K., Giusti, Domenico, Castoldi, Laura, D'Ercoli, Filippo, Tacchini, Riccardo, Leotti, Alberto, Sim, Dao Hao, Stuart Savoia, Alessandro, Lee, Joshua En-Yuan

Source: 2023 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS), 2023 IEEE International. :1-4 Sep, 2023

Relation: 2023 IEEE International Ultrasonics Symposium (IUS)