Nano-to-millimeter scale integrated systems.

Authors: Last, Howard R., Deeds, Michael, Garvick, D.

Source: IEEE Transactions on Components & Packaging Technologies; June 1999, Vol. 22 Issue 2, p338-343, 6p

Miniature hydrostat fabricated using multiple microelectromechanical processes

MEMS reliability, process monitoring, and quality assurance.

Authors: Last, Howard R., Dudley, Bruce W., Wood, Robert L.

Source: Proceedings of SPIE; Nov1999, Issue 1, p140-147, 8p

MEMS Material Microstructure and Elastic Property Modeling.

Authors: Last, Howard R., Hemker, Kevin J., Witt, Ronald

Source: MRS Online Proceedings Library; 1999, Vol. 605 Issue 1, p191-196, 6p