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1Conference
Authors: Turnquist, A., Kofuji, N., Sebastian, J., Liu, Z., Kou, H., Fukuda, H., Tomczak, Y., Sun, Y., Piumi, D., Roest, D. D.
Source: Proceedings of SPIE, the International Society for Optical Engineering. 12499:1249904-1249904-10
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2Conference
Authors: Ono, T., Oomoto, Y., Mizutani, T., Yoshioka, K., Ogawa, Y., Kofuji, N., Izawa, M., Goto, Y., Kure, T.
Source: 1999 4th International Symposium on Plasma Process-Induced Damage (IEEE Cat. No.99TH8395) Plasma process-induced damage Plasma Process-Induced Damage, 1999 4th International Symposium on. :167-170 1999
Relation: 1999 4th International Symposium on Plasma Process-Induced Damage
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3Conference
Authors: Kofuji, N., Tsujimoto, K., Mizutani, T.
Source: Proceedings of 1st International Symposium on Plasma Process-Induced Damage Plasma Process-Induced Damage, 1996 1st International Symposium on. :234-236 1996
Relation: 1st International Symposium on Plasma Process-Induced Damage
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4Conference
Authors: Laib, J., Reyes, L., Turnquist, A., Satake, M., Kofuji, N.
Source: Proceedings of SPIE, the International Society for Optical Engineering. 11610:116100O-116100O-6
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5Conference
Authors: Kofuji, N., Mori, M., Nishida, T.
Source: Proceedings of International Symposium on Dry Process. 2016:19-22
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6Conference
Authors: Kofuji, N., Tsutsumi, T., Matsumoto, E., Fujimoto, K., Itabashi, N., Izawa, M., Fujii, T., Tachi, S.
Source: PROCEEDINGS OF SYMPOSIUM ON DRY PROCESS. :23-28
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7Conference
Authors: Itabashi, N., Mori, M., Kofuji, N., Kojima, M., Fujii, T., Makino, A., Yoshigai, M., Ishimura, H., Tsujimoto, K., Tachi, S.
Source: PROCEEDINGS OF SYMPOSIUM ON DRY PROCESS. :115-120
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8Periodical
Authors: Kofuji, N., Negishi, N., Ishimura, H., Nishida, T., Kobayashi, H.
Source: PROCEEDINGS OF INTERNATIONAL SYMPOSIUM ON DRY PROCESS. :177-180
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9Periodical
Authors: Kofuji, N., Tsutsumi, T., Matsumoto, E., Fujimoto, K., Itabashi, N., Izawa, M., Fujii, T., Tachi, S.
Source: PROCEEDINGS OF INTERNATIONAL SYMPOSIUM ON DRY PROCESS. 23RD:23-28
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10Periodical
Authors: Tachi, S., Izawa, M., Tsujimoto, K., Kure, T., Kofuji, N., Suzuki, K., Hamasaki, R., Kojima, M.
Source: JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A VACUUMS SURFACES AND FILMS. 16(1):250-259
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11Periodical
Authors: Kofuji, N., Mori, M., Izawa, M., Tsujimoto, K., Tachi, S.-I.
Source: PROCEEDINGS OF SYMPOSIUM ON DRY PROCESS. 19TH:113-118
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12Periodical
Authors: Kofuji, N., Tsujimoto, K., Mizutani, T.
Source: PROCEEDINGS OF SYMPOSIUM ON DRY PROCESS. 17TH:39-44
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13Conference
Authors: Kofuji, N., Negishi, N., Ishimura, H., Nishida, T., Kobayashi, H.
Source: JAPANESE JOURNAL OF APPLIED PHYSICS -NEW SERIES-. 53(3):03DE01-03DE01
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14Conference
Authors: Kamibayashi, M., Kofuji, N., Mori, M., Negishi, N.
Source: JAPANESE JOURNAL OF APPLIED PHYSICS -NEW SERIES-. 52(5):05EB04-05EB04
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15Conference
Authors: Kofuji, N., Mori, M., Izawa, M., Tsujimoto, K.
Source: PROCEEDINGS OF SYMPOSIUM ON DRY PROCESS. 19TH:113-118
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16Conference
Authors: Kofuji, N., Tsujimoto, K., Mizutani, T.
Source: PROCEEDINGS OF SYMPOSIUM ON DRY PROCESS. 17TH:39-44
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17Conference
Authors: Arai, S., Kofuji, N., Tsugimoto, K., Mizutani, T.
Source: PROCEEDINGS OF SYMPOSIUM ON DRY PROCESS. 16TH:223-228
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18Conference
Authors: Tsujimoto, K., Kumihashi, T., Kofuji, N., Tachi, S.
Source: JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A VACUUMS SURFACES AND FILMS. 12(4//PT1):1209-1215
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19Conference
Authors: Kamibayashi, M., Kofuji, N., Mori, M., Negishi, N.
Source: PROCEEDINGS OF INTERNATIONAL SYMPOSIUM ON DRY PROCESS. :173-174
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20Conference
Authors: Kofuji, N., Miura, H.
Source: PROCEEDINGS OF INTERNATIONAL SYMPOSIUM ON DRY PROCESS. :265-266