Numerical investigation of vacuum ultra-violet emission in Ar/O$_2$ inductively coupled plasmas

Authors: Engelbrecht, Michel Osca, Jenderny, Jonathan, Hylla, Henrik, Filla, Dominik, Awakowicz, Peter, Korolov, Ihor, Ridgers, Christopher P., Gibson, Andrew R.

Subject Terms: Physics - Plasma Physics

Access URL: http://arxiv.org/abs/2402.08092

PECVD and PEALD on polymer substrates (Part II): Understanding and tuning of barrier and membrane properties of thin films

Authors: Arcos, Teresa de los, Awakowicz, Peter, Böke, Marc, Boysen, Nils, Brinkmann, Ralf Peter, Dahlmann, Rainer, Devi, Anjana, Eremin, Denis, Franke, Jonas, Gergs, Tobias, Jenderny, Jonathan, Kemaneci, Efe, Kühne, Thomas D., Kusmierz, Simon, Mussenbrock, Thomas, Rubner, Jens, Trieschmann, Jan, Wessling, Matthias, Xie, Xiaofan, Zanders, David, Zysk, Frederik, Grundmeier, Guido

Subject Terms: Condensed Matter - Soft Condensed Matter, Condensed Matter - Materials Science

Access URL: http://arxiv.org/abs/2306.14797

PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth

Authors: Arcos, Teresa de los, Awakowicz, Peter, Benedikt, Jan, Biskup, Beatrix, Böke, Marc, Boysen, Nils, Buschhaus, Rahel, Dahlmann, Rainer, Devi, Anjana, Gergs, Tobias, Jenderny, Jonathan, von Keudell, Achim, Kühne, Thomas D., Kusmierz, Simon, Müller, Hendrik, Mussenbrock, Thomas, Trieschmann, Jan, Zanders, David, Zysk, Frederik, Grundmeier, Guido

Subject Terms: Condensed Matter - Soft Condensed Matter, Condensed Matter - Materials Science

Access URL: http://arxiv.org/abs/2307.00011

A Minimally Invasive Monitoring Concept for Plasma-Assisted Surface Treatments in PET Bottles

Authors: Pohle, Dennis, Mitschker, Felix, Jenderny, Jonathan, Rudolph, Marcel, Schulz, Christian, Awakowicz, Peter, Rolfes, Ilona

Source: 2020 50th European Microwave Conference (EuMC) Microwave Conference (EuMC), 2020 50th European. :479-482 Jan, 2021

Relation: 2020 50th European Microwave Conference (EuMC)

Tuning the Permeation Properties of Poly(1‐trimethylsilyl‐1‐propyne) by Vapor Phase Infiltration Using Trimethylaluminum.

Authors: Jenderny, Jonathan¹, jonathan.jenderny@rub.de, Boysen, Nils², Rubner, Jens³, Zysk, Frederik⁴, Preischel, Florian⁵, Arcos, Teresa de los⁶, Damerla, Varun Raj⁶, Kostka, Aleksander⁷, Franke, Jonas⁸, Dahlmann, Rainer⁸, Kühne, Thomas D.^4,9,10, Wessling, Matthias³, Awakowicz, Peter¹, Devi, Anjana^2,5,11,12, anjana.devi@rub.de

Source: Advanced Materials Interfaces; Oct2024, Vol. 11 Issue 28, p1-13, 13p

PECVD and PEALD on polymer substrates (part II): Understanding and tuning of barrier and membrane properties of thin films.

Authors: de los Arcos, Teresa, Awakowicz, Peter, Böke, Marc, Boysen, Nils, Brinkmann, Ralf Peter, Dahlmann, Rainer, Devi, Anjana, Eremin, Denis, Franke, Jonas, Gergs, Tobias, Jenderny, Jonathan, Kemaneci, Efe, Kühne, Thomas D., Kusmierz, Simon, Mussenbrock, Thomas, Rubner, Jens, Trieschmann, Jan, Wessling, Matthias, Xie, Xiaofan, Zanders, David

Source: Plasma Processes & Polymers; Mar2024, Vol. 21 Issue 3, p1-26, 26p

Subject Terms: THIN films, PLASMA-enhanced chemical vapor deposition, ATOMIC layer deposition, MOLECULAR structure, SURFACE chemistry, THIN film deposition, POLYMER films

PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth.

Authors: de los Arcos, Teresa, Awakowicz, Peter, Benedikt, Jan, Biskup, Beatrix, Böke, Marc, Boysen, Nils, Buschhaus, Rahel, Dahlmann, Rainer, Devi, Anjana, Gergs, Tobias, Jenderny, Jonathan, von Keudell, Achim, Kühne, Thomas D., Kusmierz, Simon, Müller, Hendrik, Mussenbrock, Thomas, Trieschmann, Jan, Zanders, David, Zysk, Frederik, Grundmeier, Guido

Source: Plasma Processes & Polymers; Feb2024, Vol. 21 Issue 2, p1-22, 22p

Subject Terms: PLASMA-enhanced chemical vapor deposition, ATOMIC layer deposition, PLASMA chemistry, BLOOD volume, SURFACE chemistry, THIN films, POLYMER films