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    Conference

    Design and Analysis of Piezoelectric Atomizing Nozzle for Photoresist Coating

    Authors: Luo, Yi, Chen, Jian, Guo, Jin, Zhang, Bing, Hu, Hong, Huang, Jinren, Fan, Xu

    Source: 2024 18th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA), 2024 18th Symposium on. :177-181 Nov, 2024

    Relation: 2024 18th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)

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