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1Report
Authors: Kruzik, J., Horak, D., Cermak, M., Pospisil, L., Pecha, M.
Access URL: http://arxiv.org/abs/2002.06077
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2Conference
Authors: Natzle, W.C., Horak, D., Deshpande, S., Chien-Fan Yu, Liu, J.C., Mann, R.W., Doris, B., Hanafi, H., Brown, J., Sekiguchi, A., Tomoyasu, M., Yamashita, A., Prager, D., Funk, M., Cottrell, P., Higuchi, F., Takahashi, H., Sendelbach, M., Solecky, E., Wendy Yan, Tsou, L., Qingyun Yang, Norum, J.P., Iyer, S.S.
Source: 2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Cat. No.04CH37530) Advanced semiconductor manufacturing Advanced Semiconductor Manufacturing, 2004. ASMC '04. IEEE Conference and Workshop. :61-65 2004
Relation: 2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
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3Conference
Authors: Shyng-Tsong Chen, Tomizawa, H., Tsumura, K., Tagami, M., Shobha, H., Sankarapandian, M., Van der Straten, O., Kelly, J., Canaperi, D., Levin, T., Cohen, S., Yin, Y., Horak, D., Ishikawa, M., Mignot, Y., Koay, C-S., Burns, S., Halle, S., Kato, H., Landie, G., Xu, Y., Scaduto, A., Mclellan, E., Arnold, J.C., Colburn, M., Usui, T., Spooner, T.
Source: 2011 IEEE International Interconnect Technology Conference Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM), 2011 IEEE International. :1-3 May, 2011
Relation: Joint 2011 IEEE International Interconnect Technology Conference (IITC) & 2011 Materials for Advanced Metallization (MAM)
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4Conference
Authors: Tomizawa, H., Chen, S.T., Horak, D., Kato, H., Yin, Y., Ishikawa, M., Kelly, J., Koay, C.S., Landie, G., Burns, S., Tsumura, K., Tagami, M., Shobha, H., Sankarapandian, M., van der Straten, O., Maniscalco, J., Vo, T., Arnold, J., Colburn, M., Usui, T., Spooner, T.
Source: 2011 IEEE International Interconnect Technology Conference Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM), 2011 IEEE International. :1-3 May, 2011
Relation: Joint 2011 IEEE International Interconnect Technology Conference (IITC) & 2011 Materials for Advanced Metallization (MAM)
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5Academic Journal
Authors: Acharya, S. 141, Adamová, D. 95, Adler, A. 74, Adolfsson, J. 81, Aggarwal, M.M. 100, Aglieri Rinella, G. 34, Agnello, M. 30, Agrawal, N. 10, 54, Ahammed, Z. 141, Ahmad, S. 16, Ahn, S.U. 76, Akbar, Z. 51, Akindinov, A. 92, Al-Turany, M. 107, Alam, S.N. 40, 141, Albuquerque, D.S.D. 122, Aleksandrov, D. 88, Alessandro, B. 59, Alfanda, H.M. 6, Alfaro Molina, R. 71, Ali, B. 16, Ali, Y. 14, Alici, A. 10, 26, 54, Alkin, A. 2, 34, Alme, J. 21, Alt, T. 68, Altenkamper, L. 21, Altsybeev, I. 113, Anaam, M.N. 6, Andrei, C. 48, Andreou, D. 34, Andrews, H.A. 111, Andronic, A. 144, Angeletti, M. 34, Anguelov, V. 104, Anson, C. 15, Antičić, T. 108, Antinori, F. 57, Antonioli, P. 54, Apadula, N. 80, Aphecetche, L. 115, Appelshäuser, H. 68, Arcelli, S. 26, Arnaldi, R. 59, Arratia, M. 80, Arsene, I.C. 20, Arslandok, M. 104, Augustinus, A. 34, Averbeck, R. 107, Aziz, S. 78, Azmi, M.D. 16, Badalà, A. 56, Baek, Y.W. 41, Bagnasco, S. 59, Bai, X. 107, Bailhache, R. 68, Bala, R. 101, Balbino, A. 30, Baldisseri, A. 137, Ball, M. 43, Balouza, S. 105, Banerjee, D. 3, Barbera, R. 27, Barioglio, L. 25, Barnaföldi, G.G. 145, Barnby, L.S. 94, Barret, V. 134, Bartalini, P. 6, Barth, K. 34, Bartsch, E. 68, Baruffaldi, F. 28, Bastid, N. 134, Basu, S. 143, Batigne, G. 115, Batyunya, B. 75, Bauri, D. 49, Bazo Alba, J.L. 112, Bearden, I.G. 89, Beattie, C. 146, Bedda, C. 63, Behera, N.K. 61, Belikov, I. 136, Bell Hechavarria, A.D.C. 144, Bellini, F. 34, Bellwied, R. 125, Belyaev, V. 93, Bencedi, G. 145, Beole, S. 25, Bercuci, A. 48, Berdnikov, Y. 98, Berenyi, D. 145, Bertens, R.A. 130, Berzano, D. 59, Besoiu, M.G. 67, Betev, L. 34, Bhasin, A. 101, Bhat, I.R. 101, Bhat, M.A. 3, Bhatt, H. 49, Bhattacharjee, B. 42, Bianchi, A. 25, Bianchi, L. 25, Bianchi, N. 52, Bielčík, J. 37, Bielčíková, J. 95, Bilandzic, A. 105, Biro, G. 145, Biswas, R. 3, Biswas, S. 3, Blair, J.T. 119, Blau, D. 88, Blume, C. 68, Boca, G. 139, Bock, F. 96, Bogdanov, A. 93, Boi, S. 23, Bok, J. 61, Boldizsár, L. 145, Bolozdynya, A. 93, Bombara, M. 38, Bonomi, G. 140, Borel, H. 137, Borissov, A. 93, Bossi, H. 146, Botta, E. 25, Bratrud, L. 68, Braun-Munzinger, P. 107, Bregant, M. 121, Broz, M. 37, Bruna, E. 59, Bruno, G.E. 106, Buckland, M.D. 127, Budnikov, D. 109, Buesching, H. 68, Bufalino, S. 30, Bugnon, O. 115, Buhler, P. 114, Buncic, P. 34, Buthelezi, Z. 72, 131, Butt, J.B. 14, Bysiak, S.A. 118, Caffarri, D. 90, Caliva, A. 107, Calvo Villar, E. 112, Camacho, R.S. 45, Camerini, P. 24, Capon, A.A. 114, Carnesecchi, F. 26, Caron, R. 137, Castillo Castellanos, J. 137, Castro, A.J. 130, Casula, E.A.R. 55, Catalano, F. 30, Ceballos Sanchez, C. 53, Chakraborty, P. 49, Chandra, S. 141, Chang, W. 6, Chapeland, S. 34, Chartier, M. 127, Chattopadhyay, S. 141, Chauvin, A. 23, Cheshkov, C. 135, Cheynis, B. 135, Chibante Barroso, V. 34, Chinellato, D.D. 122, Cho, S. 61, Chochula, P. 34, Chowdhury, T. 134, Christakoglou, P. 90, Christensen, C.H. 89, Christiansen, P. 81, Chujo, T. 133, Cicalo, C. 55, Cifarelli, L. 10, 26, Cindolo, F. 54, Clai, G. 54, ii, Cleymans, J. 124, Colamaria, F. 53, Colella, D. 53, Collu, A. 80, Colocci, M. 26, Concas, M. 59, iii, Conesa Balbastre, G. 79, Conesa del Valle, Z. 78, Contin, G. 24, 60, Contreras, J.G. 37, Cormier, T.M. 96, Corrales Morales, Y. 25, Cortese, P. 31, Cosentino, M.R. 123, Costa, F. 34, Costanza, S. 139, Crochet, P. 134, Cuautle, E. 69, Cui, P. 6, Cunqueiro, L. 96, Dabrowski, D. 142, Dahms, T. 105, Dainese, A. 57, Damas, F.P.A. 115, 137, Danisch, M.C. 104, Danu, A. 67, Das, D. 110, Das, I. 110, Das, P. 86, Das, S. 3, Dash, A. 86, Dash, S. 49, De, S. 86, De Caro, A. 29, de Cataldo, G. 53, de Cuveland, J. 39, De Falco, A. 23, De Gruttola, D. 10, De Marco, N. 59, De Pasquale, S. 29, Deb, S. 50, Degenhardt, H.F. 121, Deja, K.R. 142, Deloff, A. 85, Delsanto, S. 25, 131, Deng, W. 6, Devetak, D. 107, Dhankher, P. 49, Di Bari, D. 33, Di Mauro, A. 34, Diaz, R.A. 8, Dietel, T. 124, Dillenseger, P. 68, Ding, Y. 6, Divià, R. 34, Dixit, D.U. 19, Djuvsland, Ø. 21, Dmitrieva, U. 62, Dobrin, A. 67, Dönigus, B. 68, Dordic, O. 20, Dubey, A.K. 141, Dubla, A. 90, 107, Dudi, S. 100, Dukhishyam, M. 86, Dupieux, P. 134, Ehlers, R.J. 96, 146, Eikeland, V.N. 21, Elia, D. 53, Epple, E. 146, Erazmus, B. 115, Erhardt, F. 99, Erokhin, A. 113, Ersdal, M.R. 21, Espagnon, B. 78, Eulisse, G. 34, Evans, D. 111, Evdokimov, S. 91, Fabbietti, L. 105, Faggin, M. 28, Faivre, J. 79, Fan, F. 6, Fantoni, A. 52, Fasel, M. 96, Fecchio, P. 30, Feliciello, A. 59, Feofilov, G. 113, Fernández Téllez, A. 45, Ferrero, A. 137, Ferretti, A. 25, Festanti, A. 34, Feuillard, V.J.G. 104, Figiel, J. 118, Filchagin, S. 109, Finogeev, D. 62, Fionda, F.M. 21, Fiorenza, G. 53, Flor, F. 125, Flores, A.N. 119, Foertsch, S. 72, Foka, P. 107, Fokin, S. 88, Fragiacomo, E. 60, Frankenfeld, U. 107, Fuchs, U. 34, Furget, C. 79, Furs, A. 62, Fusco Girard, M. 29, Gaardhøje, J.J. 89, Gagliardi, M. 25, Gago, A.M. 112, Gal, A. 136, Galvan, C.D. 120, Ganoti, P. 84, Garabatos, C. 107, Garcia-Solis, E. 11, Garg, K. 115, Gargiulo, C. 34, Garibli, A. 87, Garner, K. 144, Gasik, P. 105, 107, Gauger, E.F. 119, Gay Ducati, M.B. 70, Germain, M. 115, Ghosh, J. 110, Ghosh, P. 141, Ghosh, S.K. 3, Giacalone, M. 26, Gianotti, P. 52, Giubellino, P. 59, 107, Giubilato, P. 28, Glässel, P. 104, Gomez Ramirez, A. 74, Gonzalez, V. 107, 143, González-Trueba, L.H. 71, Gorbunov, S. 39, Görlich, L. 118, Goswami, A. 49, Gotovac, S. 35, Grabski, V. 71, Graczykowski, L.K. 142, Graham, K.L. 111, Greiner, L. 80, Grelli, A. 63, Grigoras, C. 34, Grigoriev, V. 93, Grigoryan, A. 1, Grigoryan, S. 75, Groettvik, O.S. 21, Grosa, F. 30, 59, Grosse-Oetringhaus, J.F. 34, Grosso, R. 107, Guernane, R. 79, Guittiere, M. 115, Gulbrandsen, K. 89, Gunji, T. 132, Gupta, A. 101, Gupta, R. 101, Guzman, I.B. 45, Haake, R. 146, Habib, M.K. 107, Hadjidakis, C. 78, Hamagaki, H. 82, Hamar, G. 145, Hamid, M. 6, Hannigan, R. 119, Haque, M.R. 63, 86, Harlenderova, A. 107, Harris, J.W. 146, Harton, A. 11, Hasenbichler, J.A. 34, Hassan, H. 96, Hatzifotiadou, D. 10, 54, Hauer, P. 43, Havener, L.B. 146, Hayashi, S. 132, Heckel, S.T. 105, Hellbär, E. 68, Helstrup, H. 36, Herghelegiu, A. 48, Herman, T. 37, Hernandez, E.G. 45, Herrera Corral, G. 9, Herrmann, F. 144, Hetland, K.F. 36, Hillemanns, H. 34, Hills, C. 127, Hippolyte, B. 136, Hohlweger, B. 105, Honermann, J. 144, Horak, D. 37, Hornung, A. 68, Hornung, S. 107, Hosokawa, R. 15, Hristov, P. 34, Huang, C. 78, Hughes, C. 130, Huhn, P. 68, Humanic, T.J. 97, Hushnud, H. 110, Husova, L.A. 144, Hussain, N. 42, Hussain, S.A. 14, Hutter, D. 39, Iddon, J.P. 34, 127, Ilkaev, R. 109, Ilyas, H. 14, Inaba, M. 133, Innocenti, G.M. 34, Ippolitov, M. 88, Isakov, A. 95, Islam, M.S. 110, Ivanov, M. 107, Ivanov, V. 98, Izucheev, V. 91, Jacak, B. 80, Jacazio, N. 34, Jacobs, P.M. 80, Jadlovska, S. 117, Jadlovsky, J. 117, Jaelani, S. 63, Jahnke, C. 121, Jakubowska, M.J. 142, Janik, M.A. 142, Janson, T. 74, Jercic, M. 99, Jevons, O. 111, Jin, M. 125, Jonas, F. 96, 144, Jones, P.G. 111, Jung, J. 68, Jung, M. 68, Jusko, A. 111, Kalinak, P. 64, Kalweit, A. 34, Kaplin, V. 93, Kar, S. 6, Karasu Uysal, A. 77, Karavichev, O. 62, Karavicheva, T. 62, Karczmarczyk, P. 34, Karpechev, E. 62, Kebschull, U. 74, Keidel, R. 47, Keil, M. 34, Ketzer, B. 43, Khabanova, Z. 90, Khan, A.M. 6, Khan, S. 16, Khan, S.A. 141, Khanzadeev, A. 98, Kharlov, Y. 91, Khatun, A. 16, Khuntia, A. 118, Kileng, B. 36, Kim, B. 61, Kim, D. 147, Kim, D.J. 126, Kim, E.J. 73, Kim, H. 17, Kim, J. 147, Kim, J.S. 41, Kim, M. 104, Kim, S. 18, Kim, T. 147, Kirsch, S. 68, Kisel, I. 39, Kiselev, S. 92, Kisiel, A. 142, Klay, J.L. 5, Klein, C. 68, Klein, J. 34, 59, Klein, S. 80, Klein-Bösing, C. 144, Kleiner, M. 68, Kluge, A. 34, Knichel, M.L. 34, Knospe, A.G. 125, Kobdaj, C. 116, Köhler, M.K. 104, Kollegger, T. 107, Kondratyev, A. 75, Kondratyeva, N. 93, Kondratyuk, E. 91, Konig, J. 68, Konigstorfer, S.A. 105, Konopka, P.J. 34, Kornakov, G. 142, Koska, L. 117, Kovalenko, O. 85, Kovalenko, V. 113, Kowalski, M. 118, Králik, 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