Range studies of aluminum, boron, and nitrogen implants in 4H-SiC

Authors: Stief, R., Lucassen, M., Schork, R., Ryssel, H., Holzlein, K.-H., Rupp, R., Stephani, D.

Source: 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) Ion implantation technology Ion Implantation Technology Proceedings, 1998 International Conference on. 2:760-763 vol.2 1998

Relation: 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98

Range studies of aluminum, boron, and nitrogen implants in 4H-SiC.

Authors: Stief, R., Lucassen, M., Schork, R., Ryssel, H., Holzlein, K.-H., Rupp, R., Stephani, D.

Source: 1998 International Conference on Ion Implantation Technology Proceedings (Cat No98EX144); 1999, Issue 2, p760-760, 1p