First Demonstration of Monolithic Self-aligned Heterogeneous Nanosheet Channel Complementary FETs with Matched VT by Band Alignments of Individual Channels

Authors: Tu, Chien-Te, Hsieh, Wan-Hsuan, Chen, Yu-Rui, Huang, Bo-Wei, Liao, Yu-Tsung, Chen, Wei-Jen, Liu, Yi-Chun, Cheng, Chun-Yi, Chou, Hung-Chun, Lu, Hao-Yi, Hsin, Cheng-Hsien, He, Geng-Min, Woo, Dong Soo, Chueh, Shee-Jier, Liu, C. W.

Source: 2023 International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2023 International. :1-4 Dec, 2023

Relation: 2023 International Electron Devices Meeting (IEDM)