Multiscale computational fluid dynamics modeling of an area-selective atomic layer deposition process using a discrete feed method

Authors: Henrik Wang, Matthew Tom, Feiyang Ou, Gerassimos Orkoulas, Panagiotis D. Christofides

Source: Digital Chemical Engineering, Vol 10, Iss , Pp 100140- (2024)

Subject Terms: Multiscale computational fluid dynamics modeling, Semiconductor manufacturing processes, Area-selective atomic layer deposition, Reactor optimal design, Reactor optimal operation, Chemical engineering, TP155-156, Information technology, T58.5-58.64

File Description: electronic resource

Relation: http://www.sciencedirect.com/science/article/pii/S2772508124000024; https://doaj.org/toc/2772-5081

Access URL: https://doaj.org/article/3b4258489cd94fc798dd1962f6aa22c0

Synthesis of Nitrogen and Sulfur Codoped Nanoporous Carbons from Algae: Role in CO2 Separation

Authors: Dipendu Saha, Ryan Thorpe, Scott E. Van Bramer, Nicole Alexander, Dale K. Hensley, Gerassimos Orkoulas, Jihua Chen

Source: ACS Omega, Vol 3, Iss 12, Pp 18592-18602 (2018)

Subject Terms: Chemistry, QD1-999

File Description: electronic resource

Relation: https://doaj.org/toc/2470-1343

Access URL: https://doaj.org/article/9e4a491370f74eecb6db072c670a0b53

Dynamics and Lattice-Size Dependence of Surface Mean Slope in Thin-Film Deposition.

Authors: Jianqiao Huang¹, Gangshi Hu¹, Gerassimos Orkoulas¹, Panagiotis D. Christofides¹

Source: Industrial & Engineering Chemistry Research; Feb2011, Vol. 50 Issue 3, p1219-1230, 12p