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1Academic Journal
Source: Digital Chemical Engineering, Vol 10, Iss , Pp 100140- (2024)
Subject Terms: Multiscale computational fluid dynamics modeling, Semiconductor manufacturing processes, Area-selective atomic layer deposition, Reactor optimal design, Reactor optimal operation, Chemical engineering, TP155-156, Information technology, T58.5-58.64
File Description: electronic resource
Relation: http://www.sciencedirect.com/science/article/pii/S2772508124000024; https://doaj.org/toc/2772-5081
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2Academic Journal
Authors: Dipendu Saha, Ryan Thorpe, Scott E. Van Bramer, Nicole Alexander, Dale K. Hensley, Gerassimos Orkoulas, Jihua Chen
Source: ACS Omega, Vol 3, Iss 12, Pp 18592-18602 (2018)
File Description: electronic resource
Relation: https://doaj.org/toc/2470-1343
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3Academic Journal
Authors: Jianqiao Huang1, Gangshi Hu1, Gerassimos Orkoulas1, Panagiotis D. Christofides1
Source: Industrial & Engineering Chemistry Research; Feb2011, Vol. 50 Issue 3, p1219-1230, 12p