Graded Micro-Resonators For Enhanced Sensing and Energy Harvesting In MEMS With Lead-Free Piezoelectric Materials

Authors: De Ponti, J.M., Iorio, L., Rosso, M., Maspero, F., Esposito, A., Afifi, T. Afifi, Riani, M., Gattere, G., Matteo, A. Di, Corigliano, A., Ardito, R.

Source: 2024 IEEE 23rd International Conference on Micro and Miniature Power Systems, Self-Powered Sensors and Energy Autonomous Devices (PowerMEMS) Micro and Miniature Power Systems, Self-Powered Sensors and Energy Autonomous Devices (PowerMEMS),2024 IEEE 23rd International Conference on. :155-158 Nov, 2024

Relation: 2024 IEEE 23rd International Conference on Micro and Miniature Power Systems, Self-Powered Sensors and Energy Autonomous Devices (PowerMEMS)

High-end MEMS Gyroscopes: Challenges on Mechanical Design

Authors: Viola, C., Comi, C., Zega, V., Peliti, P., Berton, F., Gattere, G., Falorni, L., Corigliano, A.

Source: 2024 DGON Inertial Sensors and Applications (ISA) DGON Inertial Sensors and Applications (ISA), 2024. :1-11 Oct, 2024

Relation: 2024 DGON Inertial Sensors and Applications (ISA)

Epitaxial Polysilicon MEMS Temperature Sensor With 0.043 °C Resolution at 4-Hz Data Rate

Authors: Frigerio, P., Fagnani, A., Zega, V., Gattere, G., Langfelder, G.

Source: IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 24(6):8123-8131 Mar, 2024

A New Design Strategy for Innovative MEMS xz-Biaxial Accelerometers

Authors: Galimberti, C., Gattere, G., Riani, M., Zega, V.

Source: IEEE Sensors Letters IEEE Sens. Lett. Sensors Letters, IEEE. 7(10):1-4 Oct, 2023

Out of Plane Double Differential Quadrature Compensation Electrodes with ThELMA-Double Technology

Authors: Fedeli, P., Falorni, L., Yallico Sanchez, G. J., Riani, M., Gattere, G.

Source: 2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2023 IEEE International Symposium on. :1-4 Mar, 2023

Relation: 2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

High Performance MEMS IMU with ThELMA-Double Technology

Authors: Gattere, G., Rizzini, F., Guerinoni, L., Falorni, L., Valzasina, C., Vercesi, F., Corso, L., Allegato, G.

Source: 2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2022 IEEE International Symposium on. :1-4 May, 2022

Relation: 2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

MEMS real-time clocks based on epitaxial polysilicon: system-level requirements and experimental characterization

Authors: Mussi, G., Frigerio, P., Langfelder, G., Gattere, G.

Source: 2020 IEEE SENSORS SENSORS, 2020 IEEE. :1-4 Oct, 2020

Relation: 2020 IEEE SENSORS

Antistiction Recoil Accelerometer

Authors: Gattere, G., Rizzini, F., Dall'Oglio, C.

Source: 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2020 IEEE International Symposium on. :1-4 Mar, 2020

Relation: 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

A MEMS Real-Time Clock With Single-Temperature Calibration and Deterministic Jitter Cancellation

Authors: Mussi, G., Frigerio, P., Gattere, G., Langfelder, G.

Source: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control IEEE Trans. Ultrason., Ferroelect., Freq. Contr. Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on. 68(3):880-889 Mar, 2021

Geometrical and Process Effects on MEMS Dimensional Loss: a Frequency Based Characterization

Authors: Gattere, G., Rizzini, F., Corso, L., Alessandri, A., Tripodi, F., Paleari, S.

Source: 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2019 IEEE International Symposium on. :1-4 Apr, 2019

Relation: 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

Numerical Modelling of Non-Linearities in MEMS Resonators

Authors: Zega, V., Gattere, G., Koppaka, S., Alter, A., Vukasin, G.D., Frangi, A., Kenny, T.W.

Source: Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 29(6):1443-1454 Dec, 2020

An Outlook on Potentialities and Limits in Using Epitaxial Polysilicon for MEMS Real-Time Clocks

Authors: Mussi, G., Bestetti, M., Zega, V., Frangi, A.A., Gattere, G., Langfelder, G.

Source: IEEE Transactions on Industrial Electronics IEEE Trans. Ind. Electron. Industrial Electronics, IEEE Transactions on. 67(8):6996-7004 Aug, 2020

Experimental investigation of MEMS DRIE etching dimensional loss

Authors: Gattere, G., Rizzini, F., Corso, L., Alessandri, A., Tripodi, F., Gelmi, I.

Source: 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2018 IEEE International Symposium on. :1-4 Mar, 2018

Relation: 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

A comprehensive model of beams' anisoelasticity in MEMS gyroscopes, with focus on the effect of axial non-vertical etching

Authors: Izadi, M., Braghin, F., Giannini, D., Milani, D., Resta, F., Brunetto, M. F., Falorni, L. G., Gattere, G., Guerinoni, L., Valzasina, C.

Source: 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2018 IEEE International Symposium on. :1-4 Mar, 2018

Relation: 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

Monolithic 3-Axis MEMS Multi-Loop Magnetometer: A Performance Analysis

Authors: Marra, C.R., Gadola, M., Laghi, G., Gattere, G., Langfelder, G.

Source: Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 27(4):748-758 Aug, 2018

Near Vacuum Gas Damping in MEMS: Simplified Modeling

Authors: Fedeli, P., Frangi, A., Laghi, G., Langfelder, G., Gattere, G.

Source: Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 26(3):632-642 Jun, 2017

Near Vacuum Gas Damping in MEMS: Numerical Modeling and Experimental Validation

Authors: Frangi, A., Fedeli, P., Laghi, G., Langfelder, G., Gattere, G.

Source: Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 25(5):890-899 Oct, 2016

Ultra Low-Noise Readout for a MEMS Epitaxial Polysilicon Temperature Sensor

Authors: Frigerio, P., Fagnani, A., Gattere, G., Langfelder, G.

Source: IEEE Transactions on Instrumentation and Measurement IEEE Trans. Instrum. Meas. Instrumentation and Measurement, IEEE Transactions on. PP(99):1-1