Formation of a field emission array for the efficient conversion of electron energy into X-ray radiation for the maskless X-ray lithography

Authors: Evsikov, I. D., Demin, G. D., Glagolev, P. Yu., Djuzhev, N. A., Makhiboroda, M. A., Chkhalo, N. I., Salashchenko, N. N., Kolos'ko, A. G., Popov, E. O.

Source: 2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS), 2019 19th International Conference on. :1-4 Dec, 2019

Relation: 2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS)

Composite optical elements for high-power lasers made by Surface Activated Direct Bonding

Authors: Kuznetsov, I. I., Pestov, A. E., Mukhin, I. B., Volkov, M. R., Zorina, M. V., Chkhalo, N. I., Palashov, O. V.

Source: 2020 International Conference Laser Optics (ICLO) Laser Optics (ICLO), 2020 International Conference. :1-1 Nov, 2020

Relation: 2020 International Conference Laser Optics (ICLO)

Observation of extreme-ultraviolet light emission from an expanding plasma jet with multiply-charged argon or xenon ions

Authors: Shalashov, A. G., Vodopyanov, A. V., Abramov, I. S., Sidorov, A. V., Gospodchikov, E. D., Razin, S. V., Chkhalo, N. I., Salashchenko, N. N., Glyavin, M. Yu., Golubev, S. V.

Source: Appl. Phys. Lett. 113, 153502 (2018); https://doi.org/10.1063/1.5049126

Subject Terms: Physics - Plasma Physics, Physics - Applied Physics

Access URL: http://arxiv.org/abs/1807.06836

Investigation of physical properties of Si crystallites in W/Si multilayers

Authors: Chkhalo, N. I., Garakhin, S. A., Kumar, N., Nikolaev, K. V., Polkovnikov, V. N., Rogachev, A., Svechnikov, M. V., Tatarsky, D. A., Yakunin, S. N.

Source: Journal of applied crystallography. 55(6):1455-1464

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100167358703.0x000001&indx=1&recIds=ETOCvdc_100167358703.0x000001

New Concept for the Development of High-Performance X-ray Lithography.

Authors: Chkhalo, N. I.¹ (AUTHOR) chkhalo@ipmras.ru

Source: Russian Microelectronics. Oct2024, Vol. 53 Issue 5, p397-407. 11p.

Subject Terms: *EXTREME ultraviolet lithography, *X-ray optics, *LITHOGRAPHY, *X-rays, *WAVELENGTHS

Development of Technological Principles for Creating a System of Microfocus X-Ray Tubes Based on Silicon Field Emission Nanocathodes

Authors: Djuzhev, N. A., Demin, G. D., Filippov, N. A., Evsikov, I. D., Glagolev, P. Yu., Makhiboroda, M. A., Chkhalo, N. I., Salashchenko, N. N., Filippov, S. V., Kolosko, A. G., Popov, E. O., Bespalov, V. A.

Source: Technical physics. 64(12):1742-1748

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100125375177.0x000001&indx=1&recIds=ETOCvdc_100125375177.0x000001

Optimization of an Anode Membrane with a Transmission-Type Target in a System of Soft X-Ray Sources for X-Ray Nanolithography

Authors: Glagolev, P. Yu., Demin, G. D., Oreshkin, G. I., Chkhalo, N. I., Djuzhev, N. A.

Source: Technical physics. 65(11):1709-1716

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100187112492.0x000001&indx=1&recIds=ETOCvdc_100187112492.0x000001

Material Surface Treatment for Design of Composite Optical Elements

Authors: Zorina, M. V., Kuznetsov, I. I., Mikhaylenko, M. S., Palashov, O. V., Pestov, A. E., Chkhalo, N. I.

Source: Technical physics. 65(11):1828-1831

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100187112217.0x000001&indx=1&recIds=ETOCvdc_100187112217.0x000001

The Smoothing Effect of Si Layers in Multilayer Be/Al Mirrors for the 17- to 31-nm Range

Authors: Pleshkov, R. S., Zuev, S. Yu., Polkovnikov, V. N., Salashchenko, N. N., Svechnikov, M. V., Chkhalo, N. I., Jonnard, P.

Source: Technical physics. 65(11):1786-1791

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100187112312.0x000001&indx=1&recIds=ETOCvdc_100187112312.0x000001

Prospects for the Use of X-Ray Tubes with a Field-Emission Cathode and a Through-Type Anode in the Range of Soft X-Ray Radiation

Authors: Barysheva, M. M., Zuev, S. Yu., Lopatin, A. Ya., Luchin, V. I., Pestov, A. E., Salashchenko, N. N., Tsybin, N. N., Chkhalo, N. I.

Source: Technical physics. 65(11):1726-1735

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100187112454.0x000001&indx=1&recIds=ETOCvdc_100187112454.0x000001

Broadband Mirrors for Spectroheliographs at the KORTES Sun Study Facility

Authors: Garakhin, S. A., Barysheva, M. M., Vishnyakov, E. A., Zuev, S. Yu., Kirichenko, A. S., Kuzin, S. V., Polkovnikov, V. N., Salashchenko, N. N., Svechnikov, M. V., Chkhalo, N. I.

Source: Technical physics. 65(11):1792-1799

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100187112261.0x000001&indx=1&recIds=ETOCvdc_100187112261.0x000001

Application of Novel Multilayer Normal-Incidence Mirrors for EUV Solar Spectroscopy

Authors: Kuzin, S. V., Reva, A. A., Bogachev, S. A., Erkhova, N. F., Salashchenko, N. N., Chkhalo, N. I., Polkovnikov, V. N.

Source: Technical physics. 65(11):1736-1739

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100187112403.0x000001&indx=1&recIds=ETOCvdc_100187112403.0x000001

Modification and Polishing of the Holographic Diffraction Grating Grooves by a Neutralized Ar Ion Beam

Authors: Garakhin, S. A., Zorina, M. V., Zuev, S. Yu., Mikhailenko, M. S., Pestov, A. E., Pleshkov, R. S., Polkovnikov, V. N., Salashchenko, N. N., Chkhalo, N. I.

Source: Technical physics. 65(11):1780-1785

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100187112325.0x000001&indx=1&recIds=ETOCvdc_100187112325.0x000001

Ion-Beam Methods for High-Precision Processing of Optical Surfaces

Authors: Zabrodin, I. G., Zorina, M. V., Kas'kov, I. A., Malyshev, I. V., Mikhailenko, M. S., Pestov, A. E., Salashchenko, N. N., Chernyshev, A. K., Chkhalo, N. I.

Source: Technical physics. 65(11):1837-1845

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100187112198.0x000001&indx=1&recIds=ETOCvdc_100187112198.0x000001

The Microstructure of Transition Boundaries in Multilayer Mo/Be Systems

Authors: Smertin, R. M., Polkovnikov, V. N., Salashchenko, N. N., Chkhalo, N. I., Yunin, P. A., Trigub, A. L.

Source: Technical physics. 65(11):1800-1808

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100187112268.0x000001&indx=1&recIds=ETOCvdc_100187112268.0x000001

Multilayer Cr/Sc Mirrors with Improved Reflection for the 'Water Transparency Window' Range

Authors: Polkovnikov, V. N., Garakhin, S. A., Kvashennikov, D. S., Malyshev, I. V., Salashchenko, N. N., Svechnikov, M. V., Smertin, R. M., Chkhalo, N. I.

Source: Technical physics. 65(11):1809-1813

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100187112228.0x000001&indx=1&recIds=ETOCvdc_100187112228.0x000001

Obtaining of Smooth High-Precision Surfaces by the Mechanical Lapping Method

Authors: Toropov, M. N., Akhsakhalyan, A. A., Zorina, M. V., Salashchenko, N. N., Chkhalo, N. I., Tokunov, Yu. M.

Source: Technical physics. 65(11):1873-1879

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100187112128.0x000001&indx=1&recIds=ETOCvdc_100187112128.0x000001

Creation of Composite Optical Elements by the Ion-Beam Surface-Activation Method for Laser Applications

Authors: Kuznetsov, I. I., Mukhin, I. B., Volkov, M. R., Palashov, O. V., Pestov, A. E., Zorina, M. V., Chkhalo, N. I., Mikhailenko, M. S.

Source: Journal of surface investigation. 14(5):1016-1021

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100177573648.0x000001&indx=1&recIds=ETOCvdc_100177573648.0x000001

Projection Objective For an EUV-Lithographic Workbench

Authors: Egorov, A. A., Zorina, M. V., Malyshev, I. V., Pestov, A. E., Polkovnikov, V. N., Salashchenko, N. N., Toropov, M. N., Tsybin, N. N., Chkhalo, N. I.

Source: Journal of surface investigation. 14(3):562-573

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100171592492.0x000001&indx=1&recIds=ETOCvdc_100171592492.0x000001

Beryllium-Based Multilayer Mirrors for the Soft X-Ray and Extreme Ultraviolet Wavelength Ranges

Authors: Vainer, Yu. A., Garakhin, S. A., Zuev, S. Yu., Nechay, A. N., Pleshkov, R. S., Polkovnikov, V. N., Salashchenko, N. N., Svechnikov, M. V., Sertsu, M. G., Smertin, R. M., Sokolov, A., Chkhalo, N. I., Schäfers, F.

Source: Journal of surface investigation. 14(1):124-134

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100171593342.0x000001&indx=1&recIds=ETOCvdc_100171593342.0x000001