Multi frequency matching for voltage waveform tailoring

Authors: Schmidt, Frederik, Schulze, Julian, Johnson, Erik, Booth, Jean-Paul, Keil, Douglas, French, David M., Trieschmann, Jan, Mussenbrock, Thomas

Source: Plasma Sources Science and Technolology 27, 095012 (2018)

Subject Terms: Physics - Plasma Physics

Access URL: http://arxiv.org/abs/1804.10357

On the use of pulsed DC bias for etching high aspect ratio features.

Authors: Shi, Xingyi¹, Xingyi_Shi@amat.com, Sadighi, Samaneh¹, Rauf, Shahid¹, Luo, Han¹, Wang, Jun-Chieh¹, Kenney, Jason¹, Booth, Jean-Paul², Marinov, Daniil², Foucher, Mickaël², Sirse, Nishant³

Source: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jan/Feb2025, Vol. 43 Issue 1, p1-13, 13p

QDB: a new database of plasma chemistries and reactions

Authors: Tennyson, Jonathan, Rahimi, Sara, Hill, Christian, Tse, Lisa, Vibhakar, Anuradha, Akello-Egwel, Dolica, Brown, Daniel B., Dzarasova, Anna, Hamilton, James R., Jaksch, Dagmar, Mohr, Sebastian, Wren-Little, Keir, Bruckmeier, Johannes, Agarwal, Ankur, Bartschat, Klaus, Bogaerts, Annemie, Booth, Jean-Paul, Goeckner, Matthew J., Hassouni, Khaled, Itikawa, Yukikazu, Braams, Bastiaan J, Krishnakumar, E., Laricchiuta, Annarita, Mason, Nigel J., Pandey, Sumeet, Petrovic, Zoran Lj., Pu, Yi-Kang, Ranjan, Alok, Rauf, Shahid, Schulze, Julian, Turner, Miles M., Ventzek, Peter, Whitehead, J. Christopher, Yoon, Jung-Sik

Source: Plasma Phys. Sci. Tech., 26, 055014 (2017)

Subject Terms: Physics - Plasma Physics

Access URL: http://arxiv.org/abs/1704.04088

Single-mode nanosecond Ti:Sapphire laser for high resolution Two-Photon Absorption Laser induced-Fluorescence (TALIF)

Authors: Murinov, Daniil, Biondello, Christophe, Booth, Jean-Paul, Guaitella, Oliver, Lottigier, Pierre, Drag, Cyril

Source: 2017 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC, 2017 Conference on). :1-1 Jun, 2017

Relation: 2017 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)

Potential Stratospheric Ozone Depletion Due To Iodine Injection From Small Satellites

Authors: Feng, Wuhu, Plane, John M. C., Chipperfield, Martyn P., Saiz‐Lopez, Alfonso, Booth, Jean‐Paul

Source: Geophysical research letters. 50(7)

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100189960554.0x000001&indx=1&recIds=ETOCvdc_100189960554.0x000001

Electron power absorption dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms in argon and CF4

Authors: Berger, Birk, Brandt, Steven, Franek, James, Schuengel, Edmund, Koepke, Mark, Schulze, Julian, Mussenbrock, Thomas, Bruneau, Bastien, Johnson, Erik, Lafleur, Trevor, Booth, Jean-Paul, O'Connell, Deborah, Gans, Timo, Korolov, Ihor, Derzsi, Aranka, Donko, Zoltan

Source: 2016 IEEE International Conference on Plasma Science (ICOPS) Plasma Science (ICOPS), 2016 IEEE International Conference on. :1-1 Jun, 2016

Relation: 2016 IEEE International Conference on Plasma Science (ICOPS)

Global model of inductively coupled radio-frequency Cl2 plasma: Dissociation, excitation and power modulation

Authors: Kemaneci, Efe H, Carbone, Emile, Rahimi, Sara, Jimenez-Diaz, Manuel, van Dijk, Jan, Kroesen, Gerrit, Booth, Jean-Paul

Source: 2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) Plasma Science (ICOPS), 2013 Abstracts IEEE International Conference on. :1-1 Jun, 2013

Relation: 2013 IEEE 40th International Conference on Plasma Sciences (ICOPS)

Gas temperature gradients in a CF4 inductive discharge.

Authors: Abada, Hana, Chabert, Pascal, Booth, Jean Paul

Source: Journal of Applied Physics; October 15 2002, Vol. 92 Issue 8, p4223-4230, 8p

Sheath electric field oscillation and ion kinetics in radio-frequency discharges.

Authors: Fadlallah, Majida, Booth, Jean-Paul, Derouard, Jacques

Source: Journal of Applied Physics; June 15 1996, Vol. 79, p8976-8981, 6p

Time-resolved electric-field measurements in 30 kHz hydrogen discharges by optical emission Stark spectroscopy.

Authors: Booth, Jean-Paul, Derouard, Jacques, Fadlallah, Majida

Source: Journal of Applied Physics; July 15 1993, Vol. 74, p862-867, 6p

Passive capacitively-coupled electrostatic (CCE) probe method for detecting plasma instabilities in a plasma processing chamber

Processing system for detecting in-situ arcing events during substrate processing

Experimental demonstration of multifrequency impedance matching for tailored voltage waveform plasmas

Authors: Wang, Junkang, Dine, Sebastien, Booth, Jean-Paul, Johnson, Erik V.

Source: Journal of vacuum science & technology.A.Vacuum, surfaces, and films. 37(2)

Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100090640621.0x000001&indx=1&recIds=ETOCvdc_100090640621.0x000001

Plasma processing in a capacitively-coupled reactor with trapezoidal-waveform excitation

Methods for automatically characterizing a plasma

Capacitively-coupled electrostatic (CCE) probe arrangement for detecting dechucking in a plasma processing chamber and methods thereof

Plasma-facing probe arrangement including vacuum gap for use in a plasma processing chamber

PASSIVE CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE METHOD FOR DETECTING PLASMA INSTABILITIES IN A PLASMA PROCESSING CHAMBER

PROCESSING SYSTEM FOR DETECTING IN-SITU ARCING EVENTS DURING SUBSTRATE PROCESSING

METHODS AND APPARATUS FOR NORMALIZING OPTICAL EMISSION SPECTRA