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    Academic Journal

    Authors: Masaru Nakagawa1,2, nakagawa@tagen.tohoku.ac.jp, Ayako Endo1, Yoshitaka Tsukidate1

    Source: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Nov/Dec2012, Vol. 30 Issue 6, p1-5, 5p